CAS #:

Linear Formula:

Al2O3 . TiO2

MDL Number:

MFCD00064749

EC No.:

234-456-9

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PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Aluminum Titanite Sputtering Target
AL-TAT-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% Aluminum Titanite Sputtering Target
AL-TAT-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Aluminum Titanite Sputtering Target
AL-TAT-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Aluminum Titanite Sputtering Target
AL-TAT-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Aluminum Titanite Sputtering Target
AL-TAT-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Aluminum Titanite Sputtering Target
AL-TAT-05-ST
Pricing > SDS > Data Sheet >

Aluminum Titanate Sputtering Target Properties (Theoretical)

Compound Formula Al2TiO5
Molecular Weight 181.83
Appearance White solid
Melting Point N/A
Boiling Point N/A
Density 3.2 g/cm3
Solubility in H2O N/A
Thermal Conductivity 1.6 W/m-K
Thermal Expansion 2.9 µm/m-K
Young's Modulus 13 GPa
Exact Mass 181.885597
Monoisotopic Mass 181.885597

Aluminum Titanate Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 03/19/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Aluminum Titanate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. AL-TAT-02-ST , AL-TAT-025-ST , AL-TAT-03-ST , AL-TAT-035-ST , AL-TAT-04-ST , AL-TAT-05-ST

CAS #: 12004-39-6

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

2.1 Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
GHS07
STOT SE 3 H335 May cause respiratory irritation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
Xi; Irritant
R37: Irritating to respiratory system.
Information concerning particular hazards for human and environment: N/A
Other hazards that do not result in classification No data available
2.2 Label elements
Labelling according to Regulation (EC) No 1272/2008 The substance is classified and labelled according to the CLP regulation.
Hazard pictograms

Exclamation Mark - GHS07

GHS07
Signal word Warning
Hazard statements
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P312 Call a POISON CENTER/doctor/if you feel unwell.
P405 Store locked up.
P403+P233 Store in a well-ventilated place. Keep container tightly closed.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

3.1 Substances
CAS# Designation:
12004-39-6 Aluminum titanium oxide
Identification number(s):
EC number: 234-456-9


SECTION 4. FIRST AID MEASURES

4.1 Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm. Consult doctor if symptoms persist.
Seek immediate medical advice.
In case of skin contact:
Instantly wash with water and soap and rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Then consult doctor.
If swallowed:
Seek medical treatment.
4.2 Most important symptoms and effects, both acute and delayed:
No data available
4.3 Indication of any immediate medical attention and special treatment needed:
No data available


SECTION 5. FIREFIGHTING MEASURES

5.1 Extinguishing media
Suitable extinguishing agents Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
5.2 Special hazards arising from the substance or mixture If this product is involved in a fire, the following can be released:
5.3 Advice for firefighters
Protective equipment:
Wear self-contained breathing apparatus.
Wear full protective suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

6.1 Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
6.2 Environmental precautions: Do not allow material to be released to the environment without official permits.
6.3 Methods and materials for containment and cleanup: Ensure adequate ventilation.
Prevention of secondary hazards: No special measures required.
6.4 Reference to other sections
See Section 7 for information on safe handling
See section 8 for information on personal protection equipment.
See Section 13 for information on disposal.


SECTION 7. HANDLING AND STORAGE

7.1 Precautions for safe handling
Keep containers tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation/exhaustion at the workplace.
Information about protection against explosions and fires: The product is not flammable
7.2 Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and containers: No special requirements.
Information about storage in one common storage facility: Not required.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
7.3 Specific end use(s) No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
8.1 Control parameters
Components with critical values that require monitoring at the workplace: Not required.
Additional information: No data
8.2 Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures should be adhered to in handling the chemicals.
Keep away from foodstuffs, beverages and food.
Instantly remove any soiled and impregnated garments.
Wash hands during breaks and at the end of the work.
Maintain an ergonomically appropriate working environment.
Breathing equipment: Use breathing protection with high concentrations.
Protection of hands:
Inspect gloves prior to use.
The selection of the suitable gloves does not only depend on the material, but also on further marks of quality and varies from manufacturer to manufacturer.
Material of gloves Impervious gloves
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

9.1 Information on basic physical and chemical properties
Appearance:
Form: Powder or solid in various forms
Colour: White
Smell: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: No data available
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flash point: N/A
Inflammability (solid, gas) No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Self-inflammability: No data available.
Danger of explosion: Product is not explosive.
Critical values for explosion:
Lower: No data available
Upper: No data available
Steam pressure: N/A
Density No data available
Relative density No data available.
Vapor density N/A
Evaporation rate N/A
Solubility in / Miscibility with
Water: Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
9.2 Other information No data available


SECTION 10. STABILITY AND REACTIVITY

10.1 Reactivity No data available
10.2 Chemical stability Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided: No decomposition if used and stored according to specifications.
10.3 Possibility of hazardous reactions No dangerous reactions known
10.4 Conditions to avoid No data available
10.5 Incompatible materials: No data available
10.6 Hazardous decomposition products: No decomposition products known.


SECTION 11. TOXICOLOGICAL INFORMATION

11.1 Information on toxicological effects
Acute toxicity: No effects known.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: Irritant for skin and mucous membranes.
Eye irritation or corrosion: Irritant effect.
Sensitization: No sensitizing effect known.
Germ cell mutagenicity: No effects known.
Carcinogenicity: No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: May cause respiratory irritation.
Aspiration hazard: No effects known.
Subacute to chronic toxicity: No effects known.
Additional toxicological information: To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

12.1 Toxicity
Aquatic toxicity: No data available
12.2 Persistence and degradability No data available
12.3 Bioaccumulative potential No data available
12.4 Mobility in soil No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Generally not hazardous for water.
Avoid transfer into the environment.
12.5 Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A
12.6 Other adverse effects No data available


SECTION 13. DISPOSAL CONSIDERATIONS

13.1 Waste treatment methods
Recommendation
Hand over to disposers of hazardous waste.
Must be specially treated under adherence to official regulations.
Consult official regulations for proper disposal.
Uncleaned packagings:
Recommendation: Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
ADR, IMDG, IATA None
14.2 UN proper shipping name
ADR, IMDG, IATA None
14.3 Transport hazard class(es)
ADR, IMDG, IATA
Class None
Packing group
ADR, IMDG, IATA None
14.5 Environmental hazards: N/A
14.6 Special precautions for user N/A
14.7 Transport in bulk according to Annex II of MARPOL73/78 and the IBC
Code N/A
Transport/Additional information: Not dangerous according to the above specifications.


SECTION 15. REGULATORY INFORMATION

15.1 Safety, health and environmental regulations/legislation specific for the substance or mixture
Australian Inventory of Chemical Substances Substance is not listed.
Standard for the Uniform Scheduling of Drugs and Poisons Substance is not listed.
National regulations
Information about limitation of use:
Employment restrictions concerning young persons must be observed.
For use only by technically qualified individuals.
Water hazard class: Generally not hazardous for water.
Other regulations, limitations and prohibitive regulations
ELINCS (European List of Notified Chemical Substances) Substance is not listed.
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006. Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on
the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use) Substance is not listed.
15.2 Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Aluminum Titanate Sputtering Target

Titanate IonAmerican Elements specializes in producing high purity Aluminum Titanite Sputtering Targets with the highest possible density High Purity (99.99%) Aluminum Titanate Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Aluminum as disc, granules, ingot, pellets, pieces, powder, and rod. Other shapes are available by request.

Aluminum Titanate Sputtering Target Synonyms

Aluminum titanium oxide, alumina titania, aluminum titanium dioxide, titanium doped alumina

Chemical Identifiers

Linear Formula Al2O3 . TiO2
MDL Number MFCD00064749
EC No. 234-456-9
Beilstein/Reaxys No. N/A
Pubchem CID 16213786
IUPAC Name oxo- bis(oxoalumanyloxy)titanium
SMILES [Al+3].[Al+3].[O-][Ti-]([O-])([O-])([O-])[O-]
InchI Identifier InChI=1S/2Al.5O.Ti/q2*+3;6*-1
InchI Key NIHWKTPTBPPIFU-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

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