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Zirconium Oxide Sputtering Target |
ZrO2 1314-23-4 |
| Product |
Product Code |
Order or Specifications |
99.9% Zirconium Oxide Sputtering Target |
ZR-OX-03ST |
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99.99% Zirconium Oxide Sputtering Target |
ZR-OX-04ST |
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99.999% Zirconium Oxide Sputtering Target |
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American Elements specializes in producing high purity Zirconium oxide sputtering targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Induction Plasma Spectrometry (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar or plate form, as well as other machined shapes and through other processes such as nanoparticles (See also application discussion at Nanotechnology Information and at Quantum Dots) and in the form of solutions and organometallics. We also produce Zirconium Oxide as rods, powder and plates. Oxide compounds are not conductive to electricity. However, certain perovskite structured oxides are electronically conductive finding application in the cathode of solid oxide fuel cells and oxygen generation systems. See research below. Other shapes are available by request.
Zirconium is a Block D, Group 4, Period 5 element. The electronic configuration is [Kr] 4d2 5s2. In its elemental form zirconium's CAS number is 7440-67-7. The zirconium atom has a radius of 159.pm and it's Van der Waals radius is 200.pm. Zirconium is primarily used in it's oxide or zirconia form. Zirconium dioxide has a high melting point (2,700° C) and a low thermal conductivity. Its polymorphism, however, restricts its widespread use in ceramic industry. During a heating process, zirconia will undergo a phase transformation process. The change in volume associated with this transformation makes the usage of pure zirconia in many applications impossible.
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| Formula |
CAS No. |
Appearance |
Molecular Weight |
| ZrO2 |
1314-23-4
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White |
123.22 |
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Recent Research & Development for Zirconium
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Lewis Acid Catalyzed Benzylic Bromination.
Chem Asian J. 2008 Jun 20. [Epub ahead of print]
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Poly(dG) Spacers Lead to Increased Surface Coverage of DNA Probes: An XPS Study of Oligonucleotide Binding to Zirconium Phosphonate Modified Surfaces.
Langmuir. 2008 Jun 12. [Epub ahead of print]
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Arsenate removal by nanostructured ZrO2 spheres.
Environ Sci Technol. 2008 May 15;42(10):3786-90.
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Y-TZP ceramic processing from coprecipitated powders: A comparative study with three commercial dental ceramics.
Dent Mater. 2008 Jun 7. [Epub ahead of print]
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Development of an immobilization and detection method of Enterobacter sakazakii from powdered infant formula.
Food Microbiol. 2008 Aug;25(5):648-52. Epub 2008 Apr 12.
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Effects of dental adhesive cement and surface treatment on bond strength and leakage of zirconium oxide ceramics.
Dent Mater J. 2008 Mar;27(2):159-71.
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Influence of fatigue testing and cementation mode on the load-bearing capability of bovine incisors restored with crowns and zirconium dioxide posts.
Clin Oral Investig. 2008 Jun 7. [Epub ahead of print]
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Fabrication and field-emission performance of zirconium disulfide nanobelt arrays.
Chem Commun (Camb). 2008 Jun 21;(23):2683-5. Epub 2008 May 14.
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New poly(ethylene glycol) solid-phase microextraction fiber employing zirconium oxide electrolytically deposited onto a NiTi alloy as substrate for sol-gel reactions.
J Chromatogr A. 2008 Jul 11;1198-1199:54-8. Epub 2008 May 23.
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4-Thiolatobenzoate-Bridged Gold/Zirconium Complex and Its Mononuclear Precursors.
Inorg Chem. 2008 Jun 5. [Epub ahead of print]
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A facile Zr-mediated multicomponent approach to arylated allylic alcohols and its application to the synthesis of highly substituted indenes and spiroindenes.
Org Biomol Chem. 2008 Jun 21;6(12):2064-70. Epub 2008 May 16.
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Removal and recovery of phosphorus from water by means of adsorption onto orange waste gel loaded with zirconium.
Bioresour Technol. 2008 Jun 2. [Epub ahead of print]
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Protective Effect of Different Tetrafluorides on Erosion of Pellicle-Free and Pellicle-Covered Enamel and Dentine.
Caries Res. 2008 Jun 4;42(4):247-254. [Epub ahead of print]
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Capture of Phosphopeptides Using alpha-Zirconium Phosphate Nanoplatelets.
Anal Chem. 2008 Jun 4. [Epub ahead of print]
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M1 gamma strength for zirconium nuclei in the photoneutron channel.
Phys Rev Lett. 2008 Apr 25;100(16):162502. Epub 2008 Apr 24.
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NADH Electrooxidation Using Bis(1,10-phenanthroline-5,6-dione) (2,2'-bipyridine)ruthenium(II)-Exchanged Zirconium Phosphate Modified Carbon Paste Electrodes.
Electroanalysis. 2006 Feb 16;18(6):559-572.
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Synthesis and Structural Determination of a Hexanuclear Zirconium Glycine Compound Formed in Aqueous Solution.
Inorg Chem. 2008 May 31. [Epub ahead of print]
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The Highly Selective Capture of Phosphopeptides by Zirconium Phosphonate-Modified Magnetic Nanoparticles for Phosphoproteome Analysis.
J Am Soc Mass Spectrom. 2008 Apr 26. [Epub ahead of print]
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Adsorption of ammonia on graphite oxide/aluminium polycation and graphite oxide/zirconium-aluminium polyoxycation composites.
J Colloid Interface Sci. 2008 Aug;324(1-2):25-35. Epub 2008 May 1.
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In situ source-template-interface reaction route to hollow ZrO(2) microspheres with mesoporous shells.
J Colloid Interface Sci. 2008 Jul 15;323(2):365-71. Epub 2008 May 22.
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