Atomic Layer Deposition of Rhenium Disulfide.

Title Atomic Layer Deposition of Rhenium Disulfide.
Authors J. Hämäläinen; M. Mattinen; K. Mizohata; K. Meinander; M. Vehkamäki; J. Räisänen; M. Ritala; M. Leskelä
Journal Adv Mater
DOI 10.1002/adma.201703622
Abstract

2D materials research is advancing rapidly as various new "beyond graphene" materials are fabricated, their properties studied, and materials tested in various applications. Rhenium disulfide is one of the 2D transition metal dichalcogenides that has recently shown to possess extraordinary properties such as that it is not limited by the strict monolayer thickness requirements. The unique inherent decoupling of monolayers in ReS2 combined with a direct bandgap and highly anisotropic properties makes ReS2 one of the most interesting 2D materials for a plethora of applications. Here, a highly controllable and precise atomic layer deposition (ALD) technique is applied to deposit ReS2 thin films. Film growth is demonstrated on large area (5 cm × 5 cm) substrates at moderate deposition temperatures between 120 and 500 °C, and the films are extensively characterized using field emission scanning electron microscopy/energy-dispersive X-ray spectroscopy, X-ray diffractometry using grazing incidence, atomic force microscopy, focused ion beam/transmission electron microscopy, X-ray photoelectron spectroscopy, and time-of-flight elastic recoil detection analysis techniques. The developed ReS2 ALD process highlights the potential of the material for applications beyond planar structure architectures. The ALD process also offers a route to an upgrade to an industrial scale.

Citation J. Hämäläinen; M. Mattinen; K. Mizohata; K. Meinander; M. Vehkamäki; J. Räisänen; M. Ritala; M. Leskelä.Atomic Layer Deposition of Rhenium Disulfide.. Adv Mater Weinheim. 2018. doi:10.1002/adma.201703622

Related Elements

Rhenium

75 Re 186.207000000 Rhenium

See more Rhenium products. Rhenium (atomic symbol: Re, atomic number: 75) is a Block D, Group 7, Period 6 element with an atomic weight of 186.207. The number of electrons in each of rhenium's shells is 2, 8, 18, 32, 13, 2 and its electron configuration is [Xe] 4f14 5d5 6s2. Rhenium Bohr ModelThe rhenium atom has a radius of 137 pm and a Van der Waals radius of 217 pm. Rhenium was discovered and first isolated by Masataka Ogawa in 1908. In its elemental form, rhenium has a silvery-white appearance. Rhenium is the fourth densest element exceeded only by platinum, iridium, and osmium. Rhenium's high melting point is exceeded only by those of tungsten and carbon.Elemental Rhenium Rhenium is found in small amounts in gadolinite and molybdenite. It is usually extracted from the flue dusts of molybdenum smelters. The name Rhenium originates from the Latin word 'Rhenus' meaning "Rhine" after the place of discovery.

Sulfur

16 S 32.065000000 Sulfur

See more Sulfur products. Sulfur (or Sulphur) (atomic symbol: S, atomic number: 16) is a Block P, Group 16, Period 3 element with an atomic radius of 32.066. Sulfur Bohr ModelThe number of electrons in each of Sulfur's shells is 2, 8, 6 and its electron configuration is [Ne] 3s2 3p4. In its elemental form, sulfur has a light yellow appearance. The sulfur atom has a covalent radius of 105 pm and a Van der Waals radius of 180 pm. In nature, sulfur can be found in hot springs, meteorites, volcanoes, and as galena, gypsum, and epsom salts. Sulfur has been known since ancient times but was not accepted as an element until 1777, when Antoine Lavoisier helped to convince the scientific community that it was an element and not a compound.

Related Forms & Applications

Sulfides
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