Hafnium Zirconium Sputtering Target

CAS #:

Linear Formula:

Hf/Zr

MDL Number:

N/A

EC No.:

N/A

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Hafnium Zirconium Sputtering Target
HF-ZR-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Hafnium Zirconium Sputtering Target
HF-ZR-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Hafnium Zirconium Sputtering Target
HF-ZR-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Hafnium Zirconium Sputtering Target
HF-ZR-05-ST
Pricing > SDS > Data Sheet >

Hafnium Zirconium Sputtering Target Properties (Theoretical)

Compound Formula Hf/Zr
Molecular Weight 269.85
Appearance Gray metallic target
Melting Point N/A
Boiling Point N/A
Density N/A
Solubility in H2O N/A
Exact Mass 269.85126 g/mol

Hafnium Zirconium Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information NONH for all modes of transport

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 03/28/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Hafnium Zirconium Sputtering Target

Product Number: All applicable American Elements product codes, e.g. HF-ZR-02-ST , HF-ZR-03-ST , HF-ZR-04-ST , HF-ZR-05-ST

CAS #: 66142-38-9

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
The product is not classified as hazardous to health or the environment according to the CLP regulation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
Not applicable
Information concerning particular hazards for human and environment:
The product does not have to be labelled due to the calculation procedure of the "General Classification guideline for preparations of the EU" in the latest valid version.
Hazards not otherwise classified
No information known.
Label elements
Labelling according to Regulation (EC) No 1272/2008
Not applicable
Hazard pictograms
Not applicable
Signal word
Not applicable
Hazard statements
Not applicable
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 0
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT: Not applicable.
vPvB: Not applicable


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Chemical characterization: Mixtures
Dangerous components: Not applicable
Additional information: None known.
Non-Hazardous Ingredients
7440-58-6 Hafnium
7440-67-7 Zirconium


SECTION 4. FIRST AID MEASURES

Description of first aid measures
General information
No special measures required.
After inhalation
Seek medical treatment in case of complaints.
After skin contact
Generally the product does not irritate the skin.
After eye contact
Rinse opened eye for several minutes under running water. If symptoms persist, consult a doctor.
After swallowing
If symptoms persist consult doctor.
Information for doctor
Most important symptoms and effects, both acute and delayed
No further relevant information available.
Indication of any immediate medical attention and special treatment needed
No further relevant information available.


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Special powder for metal fires. Do not use water.
For safety reasons unsuitable extinguishing agents
Carbon dioxide
Water
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Metal oxide fume
Advice for firefighters
Protective equipment: No special measures required.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Not required.
Environmental precautions:
Do not allow material to be released to the environment without proper governmental permits.
Do not allow product to reach sewage system or any water course.
Do not allow to penetrate the ground/soil.
Methods and material for containment and cleaning up:
Pick up mechanically.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Information about protection against explosions and fires:
No special measures required.
Conditions for safe storage, including any incompatibilities
Storage
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Store away from halogens.
Store away from halocarbons.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well sealed containers.
Specific end use(s)
No further relevant information available.


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures for handling chemicals should be followed.
Maintain an ergonomically appropriate working environment.
Breathing equipment: Not required.
Protection of hands: Not required.
Penetration time of glove material (in minutes)
Not determined
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
General Information
Appearance:
Form: Solid in various forms
Color: Grey to silver
Odor: Odorless
Odor threshold: Not determined.
pH-value: Not applicable.
Change in condition
Melting point/Melting range: Not determined.
Boiling point/Boiling range: Not determined.
Sublimation temperature / start: Not determined
Flammability (solid, gaseous): Not determined.
Ignition temperature: Not determined
Decomposition temperature: Not determined
Auto igniting: Product is not selfigniting.
Danger of explosion: Not determined.
Explosion limits:
Lower: Not determined
Upper: Not determined
Density at 20 °C (68 °F): Not determined.
Relative density: Not determined.
Vapor density: Not applicable.
Evaporation rate: Not applicable.
Solubility in / Miscibility with Water: Insoluble
Partition coefficient (n-octanol/water): Not determined.
Viscosity:
dynamic: Not applicable.
kinematic: Not applicable.


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No information known.
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No further relevant information available.
Incompatible materials:
Halogens
Halocarbons
Hazardous decomposition products:
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity: No effects known.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: Generally the product does not irritate the skin.
Eye irritation or corrosion: No irritant effect.
Sensitization: No sensitizing effects known.
Germ cell mutagenicity: No effects known.
Carcinogenicity: No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: No effects known.
Aspiration hazard: No effects known.
Subacute to chronic toxicity: No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.
The product is not subject to classification according to internally approved calculation methods for preparations


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No further relevant information available.
Persistence and degradability
No further relevant information available.
Bioaccumulative potential
No further relevant information available.
Mobility in soil
No further relevant information available.
Additional ecological information:
General notes:
Do not allow material to be released to the environment without proper governmental permits.
Do not allow undiluted product or large quantities to reach ground water, water course or sewage system.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT: Not applicable.
vPvB: Not applicable.
Other adverse effects
No further relevant information available.


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult state, local or national regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, ADN, IMDG, IATA
Not applicable
UN proper shipping name
DOT, ADN, IMDG, IATA
Not applicable
Transport hazard class(es)
DOT, ADR, ADN, IMDG, IATA
Class
Not applicable
Packing group
DOT, IMDG, IATA
Not applicable
Environmental hazards:
Marine pollutant (IMDG):
No
Special precautions for user
Not applicable.
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
Not applicable.
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No
UN "Model Regulation":
-


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings)
None of the ingredients are listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
None of the ingredients are listed.
Prop 65 - Developmental toxicity
None of the ingredients are listed.
Prop 65 - Developmental toxicity, female
None of the ingredients are listed.
Prop 65 - Developmental toxicity, male
None of the ingredients are listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
None of the ingredients are listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on themarket and use must be observed.
None of the ingredients is listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
None of the ingredients is listed.
REACH - Pre-registered substances
All ingredients are listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Hafnium Zirconium Sputtering Target

American Elements specializes in producing high purity Hafnium Zirconium Sputtering Targets with the highest possible density High Purity (99.99%) Hafnium Zirconium Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Hafnium Zirconium Sputtering Target Synonyms

HfZr, ZrHf

Chemical Identifiers

Linear Formula Hf/Zr
MDL Number N/A
EC No. N/A
Pubchem CID 57448944
IUPAC Name hafnium; zirconium
SMILES [Zr].[Hf]
InchI Identifier InChI=1S/Hf.Zr
InchI Key INIGCWGJTZDVRY-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

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Related Elements

Hafnium

See more Hafnium products. Hafnium (atomic symbol: Hf, atomic number: 72) is a Block D, Group 4, Period 6 element with an atomic weight of 178.49. Hafnium Bohr ModelThe number of electrons in each of Hafnium's shells is 2, 8, 18, 32, 10, 2 and its electron configuration is [Xe] 4f14 5d2 6s2. The hafnium atom has a radius of 159 pm and a Van der Waals radius of 212 pm. Hafnium was predicted by Dmitri Mendeleev in 1869 but it was not until 1922 that it was first isolated Dirk Coster and George de Hevesy. In its elemental form, hafnium has a lustrous silvery-gray appearance. Elemental HafniumHafnium does not exist as a free element in nature. It is found in zirconium compounds such as zircon. Hafnium is often a component of superalloys and circuits used in semiconductor device fabrication. Its name is derived from the Latin word Hafnia, meaning Copenhagen, where it was discovered.

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

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