Indium Gallium Zinc Oxide (IGZO) Sputtering Target

CAS #:

Linear Formula:

In2O3 / Ga2O3 / ZnO

MDL Number:

N/A

EC No.:

N/A

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% IGZO Sputtering Target
INGA-ZNO-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% IGZO Sputtering Target
INGA-ZNO-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% IGZO Sputtering Target
INGA-ZNO-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% IGZO Sputtering Target
INGA-ZNO-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% IGZO Sputtering Target
INGA-ZNO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% IGZO Sputtering Target
INGA-ZNO-05-ST
Pricing > SDS > Data Sheet >

Indium Gallium Zinc Oxide (IGZO) Sputtering Target Properties (Theoretical)

Compound Formula In2Ga2ZnO7
Molecular Weight 546.47
Appearance Yellow Target
Melting Point 850 °C (as In2O3)
Boiling Point N/A
Density 6.5 g/cm3
Solubility in H2O Insoluble

Indium Gallium Zinc Oxide (IGZO) Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N
Risk Codes R50/53
Safety Statements N/A
Transport Information UN3077 9/PG III
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/04/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Indium Gallium Zinc Oxide (IGZO) Sputtering Target

Product Number: All applicable American Elements product codes, e.g. INGA-ZNO-02-ST , INGA-ZNO-025-ST , INGA-ZNO-03-ST , INGA-ZNO-035-ST , INGA-ZNO-04-ST , INGA-ZNO-05-ST

CAS #: 151248-91-8

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
The substance is not classified as hazardous to health or the environment according to the CLP regulation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC

Environment - GHS09

R50/53: Very toxic to aquatic organisms, may cause long-term adverse effects in the aquatic environment.
Information concerning particular hazards for human and environment:
N/A
Hazards not otherwise classified
No data available
Label elements
Labelling according to Regulation (EC) No 1272/2008
N/A
Hazard pictograms
N/A
Signal word
N/A
Hazard statements
N/A
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 1
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
Description:
Indium Gallium Zinc Oxide
In2O3: Ga2O3: ZnO


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No data available
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Metal oxide fume
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Do not allow product to enter drains, sewage systems, or other water courses.
Do not allow material to penetrate the ground or soil.
Methods and materials for containment and cleanup:
Pick up mechanically.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Store away from oxidizing agents.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Recommended filter device for short term use:
Use a respirator with type N95 (USA) or PE (EN 143) cartridges as a backup to engineering controls. Risk assessment should be performed to determine if air-purifying respirators are appropriate. Only use equipment tested and approved under appropriate government standards.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Material of gloves
Nitrile rubber, NBR
Penetration time of glove material (in minutes)
No data available
Eye protection:
Safety glasses
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Solid
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: No data available
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flammability (solid, gas)
No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
Reacts with strong oxidizing agents
Conditions to avoid
No data available
Incompatible materials:
Oxidizing agents
Hazardous decomposition products:
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for this substance.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
May cause irritation
Eye irritation or corrosion:
May cause irritation
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains mutation data for this substance.
Carcinogenicity:
EPA-D: Not classifiable as to human carcinogenicity: inadequate human and animal evidence of carcinogenicity or no data are available.
EPA-I: Data are inadequate for an assessment of human carcinogenic potential.
EPA-II: Inadequate information to access carcinogenic potential.
Reproductive toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains reproductive data for this substance.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains multiple dose toxicity
data for this substance.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Ecotoxical effects:
Remark:
Very toxic for aquatic organisms
Additional ecological information:
Do not allow product to reach groundwater, water courses, or sewage systems.
Do not allow material to be released to the environment without official permits.
Danger to drinking water if even small quantities leak into the ground.
Also poisonous for fish and plankton in water bodies.
May cause long lasting harmful effects to aquatic life.
Avoid transfer into the environment.
Very toxic for aquatic organisms
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, IMDG, IATA
UN3077
UN proper shipping name
DOT
Environmentally hazardous substances, solid, n.o.s. (Zinc oxide)
IMDG
ENVIRONMENTALLY HAZARDOUS SUBSTANCE, SOLID, N.O.S. (Zinc oxide), MARINE POLLUTANT
IATA
ENVIRONMENTALLY HAZARDOUS SUBSTANCE, SOLID, N.O.S. (Zinc oxide)
Transport hazard class(es)
DOT, IMDG, IATA
Class
9 Miscellaneous dangerous substances and articles.
Label
9
Class
9 (M7) Miscellaneous dangerous substances and articles
Label
9
Packing group
DOT, IMDG, IATA
III
Environmental hazards:
Marine pollutant (IMDG):
Yes (P)
Symbol (fish and tree)
Special marking (ADR):
Symbol (fish and tree)
Special marking (IATA):
Symbol (fish and tree)
Special precautions for user
Warning: Miscellaneous dangerous substances and articles
EMS Number: F-A,S-F
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No
Remarks:
Special marking with the symbol (fish and tree).
UN "Model Regulation":
UN3077, Environmentally hazardous substances, solid, n.o.s. (Zinc oxide), 9, III


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings)
1314-13-2 Zinc oxide
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
REACH - Pre-registered substances
Substance is listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Indium Gallium Zinc Oxide (IGZO) Sputtering Target

High Purity (99.99%) IGZO Sputtering TargetAmerican Elements specializes in producing high purity Indium Gallium Zinc Oxide (IGZO) Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. We also produce Zinc as rods, powder and plates. Other shapes are available by request.

Indium Gallium Zinc Oxide (IGZO) Sputtering Target Synonyms

IGZO, InGaZnO, Gallium indium zinc oxide, GIZO, In2O3-Ga2O3-ZnO, InGaZnOx, InGaZnO, InZnGaO4, InGaZnOx, amorphous In2Ga2ZnO7 (a-IGZO), crystalline IGZO (c-IGZO), IGZO-TFT materials

Chemical Identifiers

Linear Formula In2O3 / Ga2O3 / ZnO
MDL Number N/A
EC No. N/A
Pubchem CID 92026789

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

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