Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.

Title Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.
Authors S. Guillon; D. Saya; L. Mazenq; J. Costecalde; D. Rèmiens; C. Soyer; L. Nicu
Journal IEEE Trans Ultrason Ferroelectr Freq Control
DOI 10.1109/TUFFC.2012.2413
Abstract

The advantage of using lead zirconate titanate (PbZr(0.54)Ti(0.46)O(3)) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.

Citation S. Guillon; D. Saya; L. Mazenq; J. Costecalde; D. Rèmiens; C. Soyer; L. Nicu.Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.. IEEE Trans Ultrason Ferroelectr Freq Control. 2012;59(9):195561. doi:10.1109/TUFFC.2012.2413

Related Elements

Lead

Lead Bohr ModelSee more Lead products. Lead (atomic symbol: Pb, atomic number: 82) is a Block P, Group 14, Period 6 element with an atomic radius of 207.2. The number of electrons in each of Lead's shells is [2, 8, 18, 32, 18, 4] and its electron configuration is [Xe] 4f14 5d10 6s2 6p2. The lead atom has a radius of 175 pm and a Van der Waals radius of 202 pm. In its elemental form, lead has a metallic gray appearance. Lead occurs naturally as a mixture of four stable isotopes: 204Pb (1.48%), 206Pb (23.6%), 207Pb (22.6%), and 208Pb (52.3%). Elemental LeadLead is obtained mainly from galena (PbS) by a roasting process. Anglesite, cerussite, and minim are other common lead containing minerals. Lead does occur as a free element in nature, but it is rare. It is a dense, soft metal that is very resistant to corrosion and poorly conductive compared to other metals. Its density and low melting point make it useful in applications such as electrolysis and industrial materials.

Titanium

See more Titanium products. Titanium (atomic symbol: Ti, atomic number: 22) is a Block D, Group 4, Period 4 element with an atomic weight of 47.867. The number of electrons in each of Titanium's shells is [2, 8, 10, 2] and its electron configuration is [Ar] 3d2 4s2. Titanium Bohr ModelThe titanium atom has a radius of 147 pm and a Van der Waals radius of 187 pm. Titanium was discovered by William Gregor in 1791 and first isolated by Jöns Jakob Berzelius in 1825. In its elemental form, titanium has a silvery grey-white metallic appearance. Titanium's properties are chemically and physically similar to zirconium, both of which have the same number of valence electrons and are in the same group in the periodic table. Elemental TitaniumTitanium has five naturally occurring isotopes: 46Ti through 50Ti, with 48Ti being the most abundant (73.8%). Titanium is found in igneous rocks and the sediments derived from them. It is named after the word Titanos, which is Greek for Titans.

Zirconium

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