Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser-assisted chemomechanical polish.

Author(s) Wu, R.; Lin, J.; Wang, M.; Fang, Z.; Chu, W.; Zhang, J.; Zhou, J.; Cheng, Y.
Journal Opt Lett
Date Published 2019 Oct 01
Abstract

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator, which is achieved by femtosecond laser-assisted chemomechanical polish. We demonstrate a high-extinction-ratio beam splitter, a 1×6 optical switch, and a balanced 3×3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.

DOI 10.1364/OL.44.004698
ISSN 1539-4794
Citation Opt Lett. 2019;44(19):46984701.

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