Fabrication of gadolinium zirconate films by laser CVD

Author(s) Yang, G.; Wang, D.; Zhang, C.; Cao, J.; Du, Y.; Liu, B.; Chen, H.; Cui, Y.; Luo, H.; Gao, Y.
Journal Ceramics International
Date Published 03/2019
Abstract In the present work, Gadolinium zirconate (GZ) films were prepared by laser CVD (LCVD) method. The influence of preparation conditions, involving preheating temperature (Tpre) and laser output power density (Pl) on morphology, microstructure, substrate temperature (Tsub) and deposition rate was thoroughly investigated. An extended formation region of GZ films, based on Tpre and Pl values, was observed at a pressure of about 0.9 kPa. Laser irradiation mainly plays a photolytic role when Pl < 0.40 W/mm2 and pyrolytic role when Pl ≥ 0.40 W/mm2 at GZ films deposition. The maximum deposition rate was up to 307 µm/h. Gd2O3-ZrO2 films phase diagram including three zones can be obtained under an optimized condition of Tpre = 1173 K, Pl = 0.80 W/mm2 and Ptot = 0.9 kPa. Pure GZ films with 0.19 ≤ Gd/Zr ≤ 1.72 can be observed at one of the three zones. In addition, Gd2O3 and ZrO2 can stabilize each other to their cubic phases, offering a stable structure.
DOI 10.1016/j.ceramint.2018.11.192
ISSN 0272-8842
Citation Yang G, Wang D, Zhang C, Cao J, Du Y, Liu B, et al. Fabrication of gadolinium zirconate films by laser CVD. Ceramics International. 2019;45(4):4926-4933.

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