Title | High-reflectance magnetron-sputtered scandium-based x-ray multilayer mirrors for the water window. |
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Authors | Burcklen, C.; de Rossi, S.; Meltchakov, E.; Dennetière, D.; Capitanio, B.; Polack, F.; Delmotte, F. |
Journal | Opt Lett |
DOI | 10.1364/OL.42.001927 |
Abstract |
We present an experimental comparison of several Sc-based short period multilayer mirrors including Cr/Sc with B4C barrier layers and CrNx/Sc, and we propose a new material combination that provides high reflectance in the water window domain. Multilayer samples with period thickness in the range 1.5-1.7 nm have been deposited by magnetron sputtering and characterized by x-ray reflectometry with a Cu-Kα source and with synchrotron radiation near the Sc-L2,3 edge. Best results are achieved by combining the nitridation of Cr layers and the addition of B4C barrier layers. Near normal incidence reflectance as high as 23% has been measured at photon energy of 397 eV. A simulation model of the multilayer structure is proposed and it predicts that reflectance higher than 32% is achievable with CrNx/B4C/Sc mirrors. |
High-reflectance magnetron-sputtered scandium-based x-ray multilayer mirrors for the water window.