The effect of calcium zirconate modifications on the microstructure and functional properties of sodium niobate thin films prepared by chemical solution deposition

Author(s) Vrabelj, T.; Matavz, A.; Ursic, H.; Bobnar, V.; Malic, B.
Journal Journal of the European Ceramic Society
Date Published 07/2019
Abstract Sodium niobate thin films doped with manganese (NN), and NN films modified with 5 or 10 mol % calcium zirconate (CZ) on platinized silicon substrates were prepared by chemical solution deposition. The 250-nm-thick films crystallize in a perovskite phase with fine, equiaxed grains. The NN films exhibit well-shaped ferroelectric loops with a remanent polarization and coercive field of ∼10 μC/cm2 and ∼100 kV/cm, respectively. The modification with CZ strongly influences the ferroelectric response of the films: the remanent polarization progressively decreases to around 2.5 μC/cm2. The absence of an anti-ferroelectric response, which has previously been confirmed in bulk NN-CZ ceramics, is attributed to the nanoscale microstructure and residual thermal stresses. All the studied films exhibit a piezoelectric response with the highest piezoelectric d33 coefficient of 35 pm/V at 300 kV/cm bias field for the NN modified films with 5 mol % CZ, making them candidates for lead-free piezoelectric thin-film applications.
DOI 10.1016/j.jeurceramsoc.2019.02.014
ISSN 0955-2219
Citation Vrabelj T, Matavz A, Ursic H, Bobnar V, Malic B. The effect of calcium zirconate modifications on the microstructure and functional properties of sodium niobate thin films prepared by chemical solution deposition. Journal of the European Ceramic Society. 2019;39(7):2325-2330.

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