Tungsten Disilicide Sputtering Target

CAS #:

Linear Formula:

WSi2

MDL Number:

MFCD00049704

EC No.:

234-909-0

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Tungsten Disilicide Sputtering Target
W-SID-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% Tungsten Disilicide Sputtering Target
W-SID-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Tungsten Disilicide Sputtering Target
W-SID-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Tungsten Disilicide Sputtering Target
W-SID-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Tungsten Disilicide Sputtering Target
W-SID-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Tungsten Disilicide Sputtering Target
W-SID-05-ST
Pricing > SDS > Data Sheet >

Tungsten Disilicide Sputtering Target Properties (Theoretical)

Compound Formula Si2W
Molecular Weight 240.01
Appearance Bluish-gray solid
Melting Point 2160 °C
Boiling Point N/A
Density 9.3 g/cm3
Solubility in H2O Insoluble
Exact Mass 239.904786
Monoisotopic Mass 239.904786

Tungsten Disilicide Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/03/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Tungsten Disilicide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. W-SID-02-ST , W-SID-025-ST , W-SID-03-ST , W-SID-035-ST , W-SID-04-ST , W-SID-05-ST

CAS #: 12039-88-2

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

2.1 Classification of the substance or mixture
Not a hazardous substance or mixture.
2.2 GHS Label elements, including precautionary statements
Not a hazardous substance or mixture.
2.3 Hazards not otherwise classified (HNOC) or not covered by GHS - none


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

3.1 Substances
Formula : Si2W
Molecular weight : 240.01 g/mol
CAS-No. : 12039-88-2
EC-No. : 234-909-0
Hazardous components
Component Classification Concentration
Tungsten disilicide
<= 100 %


SECTION 4. FIRST AID MEASURES

4.1 Description of first aid measures
If inhaled
If breathed in, move person into fresh air. If not breathing, give artificial respiration.
In case of skin contact
Wash off with soap and plenty of water.
In case of eye contact
Flush eyes with water as a precaution.
If swallowed
Never give anything by mouth to an unconscious person. Rinse mouth with water.
4.2 Most important symptoms and effects, both acute and delayed
The most important known symptoms and effects are described in the labelling (see section 2.2) and/or in section 11
4.3 Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

5.1 Extinguishing media
Suitable extinguishing media
Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide.
5.2 Special hazards arising from the substance or mixture
Tungsten oxide, silicon oxides
5.3 Advice for firefighters
Wear self-contained breathing apparatus for firefighting if necessary.
5.4 Further information
No data available


SECTION 6. ACCIDENTAL RELEASE MEASURES

6.1 Personal precautions, protective equipment and emergency procedures
Avoid dust formation. Avoid breathing Vapors, mist or gas.
For personal protection see section 8.
6.2 Environmental precautions
Do not let product enter drains.
6.3 Methods and materials for containment and cleaning up
Sweep up and shovel. Keep in suitable, closed containers for disposal.
6.4 Reference to other sections
For disposal see section 13.


SECTION 7. HANDLING AND STORAGE

7.1 Precautions for safe handling
Provide appropriate exhaust ventilation at places where dust is formed.Normal measures for preventive fire protection.
For precautions see section 2.2.
7.2 Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place.
7.3 Specific end use(s)
Apart from the uses mentioned in section 1.2 no other specific uses are stipulated


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

8.1 Control parameters
Components with workplace control parameters
Component CAS-No. Value Control
parameters
Basis
Tungsten disilicide 12039-88-2 TWA 5.000000
mg/m3
USA. ACGIH Threshold Limit Values
(TLV)
Remarks Lower Respiratory Tract irritation
varies
STEL 10.000000
mg/m3
USA. ACGIH Threshold Limit Values
(TLV)
Lower Respiratory Tract irritation
varies
TWA 5.000000
mg/m3
USA. NIOSH Recommended
Exposure Limits
ST 10.000000
mg/m3
USA. NIOSH Recommended
Exposure Limits
8.2 Exposure controls
Appropriate engineering controls
General industrial hygiene practice.
Personal protective equipment
Eye/face protection
Use equipment for eye protection tested and approved under appropriate government standards such as
NIOSH (US) or EN 166(EU).
Skin protection
Handle with gloves. Gloves must be inspected prior to use. Use proper glove removal technique (without
touching glove's outer surface) to avoid skin contact with this product. Dispose of contaminated gloves after
use in accordance with applicable laws and good laboratory practices. Wash and dry hands.
Body Protection
Choose body protection in relation to its type, to the concentration and amount of dangerous substances, and
to the specific work-place., The type of protective equipment must be selected according to the concentration
and amount of the dangerous substance at the specific workplace.
Respiratory protection
Respiratory protection is not required. Where protection from nuisance levels of dusts are desired, use type
N95 (US) or type P1 (EN 143) dust masks. Use respirators and components tested and approved under
appropriate government standards such as NIOSH (US) or CEN (EU).
Control of environmental exposure
Do not let product enter drains.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

9.1 Information on basic physical and chemical properties
a) Appearance Form: solid
b) Odor No data available
c) Odor Threshold No data available
d) pH No data available
e) Melting point/freezing
point
No data available
f) Initial boiling point and
boiling range
No data available
g) Flash point No data available
h) Evaporation rate No data available
i) Flammability (solid, gas) No data available
j) Upper/lower
flammability or
explosive limits
No data available
k) Vapor pressure No data available
l) Vapor density No data available
m) Relative density No data available
n) Water solubility No data available
o) Partition coefficient: noctanol/
water
No data available
p) Auto-ignition
temperature
No data available
q) Decomposition
temperature
No data available
r) Viscosity No data available
s) Explosive properties No data available
t) Oxidizing properties No data available
9.2 Other safety information
No data available


SECTION 10. STABILITY AND REACTIVITY

10.1 Reactivity
No data available
10.2 Chemical stability
Stable under recommended storage conditions.
10.3 Possibility of hazardous reactions
No data available
10.4 Conditions to avoid
No data available
10.5 Incompatible materials
acids
10.6 Hazardous decomposition products
Other decomposition products - No data available
In the event of fire: see section 5


SECTION 11. TOXICOLOGICAL INFORMATION

11.1 Information on toxicological effects
Acute toxicity
No data available
Inhalation: No data available
Dermal: No data available
No data available
Skin corrosion/irritation
No data available
Serious eye damage/eye irritation
No data available
Respiratory or skin sensitisation
No data available
Germ cell mutagenicity
No data available
Carcinogenicity
IARC: No component of this product present at levels greater than or equal to 0.1% is identified as
probable, possible or confirmed human carcinogen by IARC.
ACGIH: No component of this product present at levels greater than or equal to 0.1% is identified as a
carcinogen or potential carcinogen by ACGIH.
NTP: No component of this product present at levels greater than or equal to 0.1% is identified as a
known or anticipated carcinogen by NTP.
OSHA: No component of this product present at levels greater than or equal to 0.1% is identified as a
carcinogen or potential carcinogen by OSHA.
Reproductive toxicity
No data available
No data available
Specific target organ toxicity - single exposure
No data available
Specific target organ toxicity - repeated exposure
No data available
Aspiration hazard
No data available
Additional Information
RTECS: Not available


SECTION 12. ECOLOGICAL INFORMATION

12.1 Toxicity
No data available
12.2 Persistence and degradability
No data available
12.3 Bioaccumulative potential
No data available
12.4 Mobility in soil
No data available
12.5 Results of PBT and vPvB assessment
PBT/vPvB assessment not available as chemical safety assessment not required/not conducted
12.6 Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

13.1 Waste treatment methods
Product
Offer surplus and non-recyclable solutions to a licensed disposal company.
Contaminated packaging
Dispose of as unused product.


SECTION 14. TRANSPORT INFORMATION

DOT (US)
Not dangerous goods
IMDG
Not dangerous goods
IATA
Not dangerous goods


SECTION 15. REGULATORY INFORMATION

SARA 302 Components
No chemicals in this material are subject to the reporting requirements of SARA Title III, Section 302.
SARA 313 Components
This material does not contain any chemical components with known CAS numbers that exceed the threshold (De
Minimis) reporting levels established by SARA Title III, Section 313.
Massachusetts Right To Know Components
No components are subject to the Massachusetts Right to Know Act.
Pennsylvania Right To Know Components
Tungsten disilicide
CAS-No.
12039-88-2
Revision Date
New Jersey Right To Know Components
Tungsten disilicide
CAS-No.
12039-88-2
Revision Date
California Prop. 65 Components
This product does not contain any chemicals known to State of California to cause cancer, birth defects, or any other
reproductive harm.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Tungsten Disilicide Sputtering Target

American Elements specializes in producing high purity Tungsten Disilicide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Tungsten as rods, powder and plates. Other shapes are available by request.

Tungsten Disilicide Sputtering Target Synonyms

Tungsten silicide,

Chemical Identifiers

Linear Formula WSi2
MDL Number MFCD00049704
EC No. 234-909-0
Beilstein/Reaxys No. N/A
Pubchem CID 16212546
IUPAC Name bisλ3- (silanylidyne)tungsten
SMILES [Si]#[W]#[Si]
InchI Identifier InChI=1S/2Si.W
InchI Key WQJQOUPTWCFRMM-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

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Related Elements

Silicon

See more Silicon products. Silicon (atomic symbol: Si, atomic number: 14) is a Block P, Group 14, Period 3 element with an atomic weight of 28.085. Silicon Bohr MoleculeThe number of electrons in each of Silicon's shells is 2, 8, 4 and its electron configuration is [Ne] 3s2 3p2. The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm. Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823. Silicon makes up 25.7% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen. The metalloid is rarely found in pure crystal form and is usually produced from the iron-silicon alloy ferrosilicon. Elemental SiliconSilica (or silicon dioxide), as sand, is a principal ingredient of glass, one of the most inexpensive of materials with excellent mechanical, optical, thermal, and electrical properties. Ultra high purity silicon can be doped with boron, gallium, phosphorus, or arsenic to produce silicon for use in transistors, solar cells, rectifiers, and other solid-state devices which are used extensively in the electronics industry.The name Silicon originates from the Latin word silex which means flint or hard stone.

Tungsten

See more Tungsten products. Tungsten (atomic symbol: W, atomic number: 74) is a Block D, Group 6, Period 6 element with an atomic weight of 183.84. The number of electrons in each of tungsten's shells is [2, 8, 18, 32, 12, 2] and its electron configuration is [Xe] 4f14 5d4 6s2. Tungsten Bohr ModelThe tungsten atom has a radius of 139 pm and a Van der Waals radius of 210 pm. Tungsten was discovered by Torbern Bergman in 1781 and first isolated by Juan José Elhuyar and Fausto Elhuyar in 1783. In its elemental form, tungsten has a grayish white, lustrous appearance. Elemental TungstenTungsten has the highest melting point of all the metallic elements and a density comparable to that or uranium or gold and about 1.7 times that of lead. Tungsten alloys are often used to make filaments and targets of x-ray tubes. It is found in the minerals scheelite (CaWO4) and wolframite [(Fe,Mn)WO4]. In reference to its density, Tungsten gets its name from the Swedish words tung and sten, meaning heavy stone.

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