Yttrium Oxide Sputtering Target



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Product Code Product Request Quote
Y-OX-02-ST 99% Yttrium Oxide Sputtering Target Request
Y-OX-03-ST (3N) 99.9% Yttrium Oxide Sputtering Target Request
Y-OX-04-ST (4N) 99.99% Yttrium Oxide Sputtering Target Request
Y-OX-05-ST (5N) 99.999% Yttrium Oxide Sputtering Target Request


Oxide IonAmerican Elements specializes in producing high purity Yttrium Oxide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes nanoparticles. We also produce Yttrium Oxide as rods, powder and plates. Oxide compounds are not conductive to electricity. Other shapes are available by request.


Yttria, Yttrium sesquioxide, Oxygen(2-); yttrium(3+), Yttrium trioxide, Diyttrium trioxide, Yttrium(3+) oxide

Chemical Identifiers

Formula Y2O3
CAS 1314-36-9
Pubchem CID 518711
MDL MFCD00011473
EC No. 215-233-5
IUPAC Name oxo(oxoyttriooxy)yttrium
Beilstein Registry No. N/A
InchI Identifier InChI=1S/3O.2Y


Compound Formula O3Y2
Molecular Weight 225.81
Appearance Solid
Melting Point 2425 °C
Boiling Point 4300 °C
Density 5.01 g/cm3
Exact Mass 225.79644
Monoisotopic Mass 225.79644

Health & Safety Info  |  MSDS / SDS

Signal Word Warning
Hazard Statements H315-H319-H335
Hazard Codes Xi
Risk Codes 36/37/38
Safety Statements 26-36
RTECS Number N/A
Transport Information ZG3850000
WGK Germany 1
Globally Harmonized System of Classification and Labelling (GHS) N/A

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Material Safety Data Sheet (MSDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes.

Related Products

YSee more Yttrium products. Yttrium (atomic symbol: Y, atomic number: 39) is a Block D, Group 3, Period 5 element with an atomic weight of 88.90585. Yttrium Bohr ModelThe number of electrons in each of yttrium's shells is [2, 8, 18, 9, 2] and its electron configuration is [Kr] 4d1 5s2. The yttrium atom has a radius of 180 pm and a Van der Waals radius of 219 pm. Yttrium was discovered by Johann Gadolin in 1794 and first isolated by Carl Gustav Mosander in 1840. Elemental Yttrium In its elemental form, Yttrium has a silvery white metallic appearance. Yttrium has the highest thermodynamic affinity for oxygen of any element. Yttrium is not found in nature as a free element and is almost always found combined with the lanthanides in rare earth minerals. While not part of the rare earth series, it resembles the heavy rare earths which are sometimes referred to as the "yttrics" for this reason. Another unique characteristic derives from its ability to form crystals with useful properties. The name yttrium originated from a Swedish village near Vaxholm called Yttbery where it was discovered.


Recent Research & Development for Yttrium

  • Effects of Yttrium-90 selective internal radiation therapy on non-conventional liver tumors. Kuei A, Saab S, Cho SK, Kee ST, Lee EW. World J Gastroenterol. 10/21/2015
  • Dynamic Nuclear Polarization NMR of Low-? Nuclei: Structural Insights into Hydrated Yttrium-Doped BaZrO3. Blanc F, Sperrin L, Lee D, Dervi?o?lu R, Yamazaki Y, Haile SM, De Paëpe G, Grey CP. J Phys Chem Lett. 9/30/2015
  • Erratum to: Yttrium-90 radioembolization for hepatocellular carcinoma in hepatitis B: commentary on a 103-patient Asian cohort. Kulik L, Salem R. Hepatol Int. 9/28/2015
  • The use of Yttrium-90 Ibritumomab Tiuxetan ((90)Y-IT) as a consolidation therapy in high-risk patients with diffuse large B-cell lymphoma ineligible for autologous stem-cell transplantation. Jurczak W, Kisiel E, Sawczuk-Chabin J, Centkowski P, Knopi?ska-Pos?uszny W, Khan O. Contemp Oncol (Pozn). 9/28/2015
  • Yttrium-90 microsphere radioembolotherapy in a patient with spontaneously ruptured hepatocellular carcinoma. Winokur RS, Talenfeld AD, Mozley PD, Madoff DC. Clin Imaging. 9/26/2015
  • Yttrium-90 radioembolization for hepatocellular carcinoma in hepatitis B: commentary on a 103-patient Asian cohort. Kulik L, Salem R. Hepatol Int. 9/25/2015
  • Effect of neodymium:yttrium-aluminum-garnet laser and fluoride on the acid demineralization of enamel. Braga SR, de Oliveira E, Sobral MA. J Investig Clin Dent. 9/25/2015
  • A prospective, randomized, double-blind comparison of an ablative fractional 2940-nm erbium-doped yttrium aluminum garnet laser with a nonablative fractional 1550-nm erbium-doped glass laser for the treatment of photoaged Asian skin. Moon HR, Yun WJ, Lee YJ, Lee MW, Chang S. J Dermatolog Treat. 9/23/2015
  • Evaluation of Liver Biomarkers as Prognostic Factors for Outcomes to Yttrium-90 Radioembolization of Primary and Secondary Liver Malignancies. Henrie AM, Wittstrom K, Delu A, Deming P. Cancer Biother Radiopharm. 9/14/2015
  • Shape-Controlled Synthesis of Isotopic Yttrium-90-Labeled Rare Earth Fluoride Nanocrystals for Multimodal Imaging. Paik T, Chacko AM, Mikitsh JL, Friedberg JS, Pryma DA, Murray CB. ACS Nano. 9/10/2015

Recent Research & Development for Oxides

  • Nitric oxide is involved in brassinosteroid induced alternative respiratory pathway in Nicotiana benthamiana seedlings' response to salt stress. Zhu T, Deng XG, Tan WR, Zhou X, Luo SS, Han XY, Zhang DW, Lin HH. Physiol Plant. 9/30/2015
  • Sc2O@C2v(5)-C80: Dimetallic Oxide Cluster Inside a C80 Fullerene Cage. Tang Q, Abella L, Hao Y, Li X, Wan Y, Rodríguez-Fortea A, Poblet JM, Feng L, Chen N. Inorg Chem. 9/30/2015
  • Use of ultrasmall superparamagnetic iron oxide particles for imaging carotid atherosclerosis. Usman A, Sadat U, Patterson AJ, Tang TY, Varty K, Boyle JR, Armon MP, Hayes PD, Graves MJ, Gillard JH. Nanomedicine (Lond). 9/29/2015
  • Structure and energetics of graphene oxide isomers: ab initio thermodynamic analysis. Chaban VV, Prezhdo OV. Nanoscale. 9/29/2015
  • Genotoxic and oxidative stress potential of nanosized and bulk zinc oxide particles in Drosophila melanogaster. Carmona ER, Inostroza-Blancheteau C, Rubio L, Marcos R. Toxicol Ind Health. 9/23/2015
  • The role of flow-independent exhaled nitric oxide parameters in the assessment of airway diseases. Paraskakis E, Vergadi E, Chatzimichael A, Bush A. Curr Top Med Chem. 9/23/2015
  • Investigations into Recycling Zinc from Used Metal Oxide Varistors via pH Selective Leaching: Characterization, Leaching, and Residue Analysis. Gutknecht T, Gustafsson A, Forsgren C, Ekberg C, Steenari BM. ScientificWorldJournal. 9/21/2015
  • Mitogen-activated protein kinases regulate expression of neuronal nitric oxide synthase and neurite outgrowth via non-classical retinoic acid receptor signaling in human neuroblastoma SH-SY5Y cells. Fujibayashi T, Kurauchi Y, Hisatsune A, Seki T, Shudo K, Katsuki H. J Pharmacol Sci. 9/5/2015
  • Polarization-Mediated Thermal Stability of Metal/Oxide Heterointerface. Zhang Q, You L, Shen X, Wan C, Yuan Z, Zhang X, Huang L, Kong W, Wu H, Yu R, Wang J, Han X. Adv Mater. 8/22/2015
  • Electrochemical imprinted polycrystalline nickel-nickel oxide half-nanotube-modified boron-doped diamond electrode for the detection of L-serine. Dai W, Li H, Li M, Li C, Wu X, Yang B. ACS Appl Mater Interfaces. 4/3/2015

Free Test Sample Program

We recognize many of our customers are purchasing small quantities directly online as trial samples in anticipation of placing a larger future order or multiple orders as a raw material for production. Since our primary business is the production of industrial quantities and/or highly consistent batches which can be used for commercial production and purchased repeatedly in smaller quantity, American Elements offers trial samples at no charge on the following basis. Within 6 months of purchasing materials directly online from us, you have the option to refer back to that order and advise that it is the intention of your company, institution or lab to either purchase a larger quantity, purchase the material in regular intervals or purchase more on some other basis.

We will then evaluate your future needs and assuming the quantity or number of future purchases qualify, we will fully credit your purchase price with the next order. Because of the many variables in the quantity and number of orders you may place, it is impossible to evaluate whether your future order(s) will qualify for this program prior to your placing your next order. Please know American Elements strongly desires to make this free sample program available to you and will make every effort to do so once your next order is placed.