Yttrium Oxide Sputtering Target



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Product Code Available Product Forms Request A Quote
Y-OX-02-ST 99% Yttrium Oxide Sputtering Target Request
Y-OX-03-ST (3N) 99.9% Yttrium Oxide Sputtering Target Request
Y-OX-04-ST (4N) 99.99% Yttrium Oxide Sputtering Target Request
Y-OX-05-ST (5N) 99.999% Yttrium Oxide Sputtering Target Request


Compound Formula O3Y2
Molecular Weight 225.81
Appearance Solid
Melting Point 2425 °C
Boiling Point 4300 °C
Density 5.01 g/cm3
Exact Mass 225.79644
Monoisotopic Mass 225.79644

Health & Safety Info  |  MSDS / SDS

Signal Word Warning
Hazard Statements H315-H319-H335
Hazard Codes Xi
Risk Codes 36/37/38
Safety Statements 26-36
RTECS Number N/A
Transport Information ZG3850000
WGK Germany 1
Globally Harmonized System of Classification and Labelling (GHS) N/A


Oxide IonAmerican Elements specializes in producing high purity Yttrium Oxide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes nanoparticles. We also produce Yttrium Oxide as rods, powder and plates. Oxide compounds are not conductive to electricity. Other shapes are available by request.


Yttria, Yttrium sesquioxide, Oxygen(2-); yttrium(3+), Yttrium trioxide, Diyttrium trioxide, Yttrium(3+) oxide

Chemical Identifiers

Formula Y2O3
CAS 1314-36-9
Pubchem CID 518711
MDL MFCD00011473
EC No. 215-233-5
IUPAC Name oxo(oxoyttriooxy)yttrium
Beilstein Registry No. N/A
InchI Identifier InChI=1S/3O.2Y

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Material Safety Data Sheet (MSDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes.

Related Products & Element Information

See more Yttrium products. Yttrium (atomic symbol: Y, atomic number: 39) is a Block D, Group 3, Period 5 element with an atomic weight of 88.90585. Yttrium Bohr ModelThe number of electrons in each of yttrium's shells is [2, 8, 18, 9, 2] and its electron configuration is [Kr] 4d1 5s2. The yttrium atom has a radius of 180 pm and a Van der Waals radius of 219 pm. Yttrium was discovered by Johann Gadolin in 1794 and first isolated by Carl Gustav Mosander in 1840. Elemental Yttrium In its elemental form, Yttrium has a silvery white metallic appearance. Yttrium has the highest thermodynamic affinity for oxygen of any element. Yttrium is not found in nature as a free element and is almost always found combined with the lanthanides in rare earth minerals. While not part of the rare earth series, it resembles the heavy rare earths which are sometimes referred to as the "yttrics" for this reason. Another unique characteristic derives from its ability to form crystals with useful properties. The name yttrium originated from a Swedish village near Vaxholm called Yttbery where it was discovered.