Zirconium Phosphide Sputtering Target

CAS #:

Linear Formula:

ZrP

MDL Number:

N/A

EC No.:

234-866-8

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PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Zirconium Phosphide Sputtering Target
ZR-P-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% Zirconium Phosphide Sputtering Target
ZR-P-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Zirconium Phosphide Sputtering Target
ZR-P-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Zirconium Phosphide Sputtering Target
ZR-P-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Zirconium Phosphide Sputtering Target
ZR-P-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Zirconium Phosphide Sputtering Target
ZR-P-05-ST
Pricing > SDS > Data Sheet >

Zirconium Phosphide Sputtering Target Properties (Theoretical)

Compound Formula PZr
Molecular Weight 122.2
Appearance solid
Melting Point N/A
Boiling Point 120.878465
Density 120.878465
Solubility in H2O N/A
Monoisotopic Mass <a href="request.html">Safety Data Sheet </a>

Zirconium Phosphide Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/08/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Zirconium Phosphide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. ZR-P-02-ST , ZR-P-025-ST , ZR-P-03-ST , ZR-P-035-ST , ZR-P-04-ST , ZR-P-05-ST

CAS #: 12037-72-8

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
GHS Classification in accordance with 29 CFR 1910 (OSHA HCS)
Corrosive to metals(Category 1), H290
Acute toxicity, Oral(Category 3), H301
Acute toxicity, Inhalation(Category 4), H332
Skin corrosion(Category 1A), H314
Serious eye damage(Category 1), H318
Acute aquatic toxicity(Category 1), H400

GHS Label elements, including precautionary statements
Pictogram

Skull and Crossbones - GHS06 Corrosion - GHS05 Environment - GHS09

Signal word
Danger
Hazard statement(s)
H290
May be corrosive to metals.
H301
Toxic if swallowed.
H314
Causes severe skin burns and eye damage.
H332
Harmful if inhaled.
H400
Very toxic to aquatic life.
Precautionary statement(s)
P234
Keep only in original container.
P260
Do not breathe dust or mist.
P264
Wash skin thoroughly after handling.
P270
Do not eat, drink or smoke when using this product.
P271
Use only outdoors or in a well-ventilated area.
P273
Avoid release to the environment.
P280
Wear protective gloves/ protective clothing/ eye protection/ face protection.
P301 + P310
IF SWALLOWED: Immediately call a POISON CENTER or doctor/ physician.
P301 + P330 + P331
IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
P303 + P361 + P353
IF ON SKIN (or hair): Remove/ Take off immediately all contaminated
clothing. Rinse skin with water/ shower.
P304 + P340
IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing.
P305 + P351 + P338
IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P310
Immediately call a POISON CENTER or doctor/ physician.
P321
Specific treatment (see supplemental first aid instructions on this label).
P363
Wash contaminated clothing before reuse.
P390
Absorb spillage to prevent material damage.
P391
Collect spillage.
P405
Store locked up.
P406
Store in corrosive resistant stainless steel container with a resistant inner liner.
P501
Dispose of contents/ container to an approved waste disposal plant.
Hazards not otherwise classified (HNOC) or not covered by GHS
Contact with acids liberates toxic gas.


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

CHEMICAL FAMILY: Metal phosphide
CAS NUMBER: 12037-72-8
FORMULA: ZrP
MOLECULAR WEIGHT: 122.19


SECTION 4. FIRST AID MEASURES

EMERGENCY AND FIRST AID PROCEDURES

INHALATION: Remove victim to fresh air; keep warm and quiet; give oxygen if breathing is difficult and seek medical attention immediatley.

INGESTION: Give 1-2 glasses of milk or water and induce vomiting; seek medical attention immediatley. Never induce vomiting or give anything by mouth to an unconscious person.

SKIN: Remove contaminated clothing; brush material off skin; wash affected area with mild soap and water; seek medical attention.

EYE: Flush eyes with lukewarm water, lifting upper and lower eyelids, for at least 15 minutes. Seek medical attention.


SECTION 5. FIREFIGHTING MEASURES

FLASH PT: N.A. Method Used: Unknown
EXPLOSIVE LIMITS: LEL: NE UEL: NE
EXTINGUISHING MEDIA

USE: Class D or other extinguishing agent for metal fires.

SPECIAL FIRE FIGHTING PROCEDURES

Firefighters must wear full face, self-contained breathing apparatus with full protective clothing to prevent contact with skin and eyes. Fumes from fire are hazardous. Isolate runoff to prevent environmental pollution.
UNUSUAL FIRE AND EXPLOSION HAZARDS

DANGEROUS WHEN WET.
When heated to decomposition, zirconium phosphide may emit toxic oxides of phosphorus.
On contact with water, steam, moisture or alkali, it may slowely yield spontaneously flammable, phosphine gas.


SECTION 6. ACCIDENTAL RELEASE MEASURES

STEPS TO BE TAKEN IN CASE MATERIAL IS RELEASED OR SPILLED

Wear appropriate respiratory and protective equipment specified in section VIII-control measures. Isolate spill area, provide ventilation and extinguish sources of ignition. Vacuum up spill using a high efficiency particulate absolute (HEPA) air filter and place in a closed container for proper disposal. Take care not to raise dust. Use non-sparking tools.


SECTION 7. HANDLING AND STORAGE

HAZARD LABEL INFORMATION:
Store in cool, dry area Store in tightly sealed container Wash thoroughly after handling
PRECAUTIONS TO BE TAKEN IN HANDLING

Reacts with water, steam and moisture. Handle in a controlled environment and under an inert gas such as argon.
OTHER PRECAUTIONS

None


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

PROTECTIVE EQUIPMENT SUMMARY - HAZARD LABEL INFORMATION:
NIOSH approved respirator Impervious gloves Safety goggles Clothes to prevent skin contact
RESPIRATORY EQUIPMENT (SPECIFY TYPE)
NIOSH - approved respirator
EYE PROTECTION
Safety goggles
PROTECTIVE GLOVES
Impervious gloves
OTHER PROTECTIVE CLOTHING
Protective gear suitable to prevent contamination
VENTILATION
Local Exhaust: Local exhaust ventilation may be necessary to control any air contaminants to within their PELs or TLVs during the use of this product.
Special: Handle in a controlled environment
Mechanical (Gen): Not recommended
Other: Handle and store in an inert gas such as argon
WORK/HYGIENIC/MAINTENANCE PRACTICES

Implement engineering and work practice controls to reduce and maintain concentration of exposure at low levels. Use good housekeeping and sanitation practices. Do not use tobacco or food in work area. Wash thoroughly before eating and smoking. Do not blow dust off clothing or skin with compressed air.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

PHYSICAL STATES: [ ] Gas [ ] Liquid [ X ] Solid
MELTING POINT: N.A.
BOILING POINT: N.A.
SPECIFIC GRAVITY (WATER = 1): 4.77
BULK DENSITY: No data.
VAPOR PRESSURE (VS. AIR OR MM HG): No data.
VAPOR DENSITY (VS. AIR = 1): No data.
EVAPORATION RATE (VS BUTYL ACETATE=1): No data.
SOLUBILITY IN WATER: No data.
PERCENT VOLATILE: N.A.
CORROSION RATE: No data.
APPEARANCE AND ODOR

Grey powder and pieces; no odor


SECTION 10. STABILITY AND REACTIVITY

STABILITY: Unstable [ X ] Stable [ ]
CONDITIONS TO AVOID - INSTABILITY

Protect from moisture and water.
INCOMPATIBILITY - MATERIALS TO AVOID

Water, steam, moisture

HAZARDOUS DECOMPOSITION OR BYPRODUCTS

Oxides of phosphorus and phosphine
HAZARDOUS POLYMERIZATION: Will occur [ ] Will not occur [ X ]
CONDITIONS TO AVOID - HAZARDOUS POLYMERIZATION

None


SECTION 11. TOXICOLOGICAL INFORMATION

INHALATION: May cause a red, dry, throat and coughing. Phosphine may cause thirst, chest pressure, shortness of breath, muscle pain, chills and stupor.

INGESTION: May cause nausea, vomiting, abdominal pain and diarrhea.

SKIN: May cause red, itching and burning.

EYE: May cause red, itching and watering.
MEDICAL CONDITIONS GENERALLY AGGRAVATED BY EXPOSURE

Pre-existing respiratory disorders.

TARGET ORGANS: May affect the skin, respiratory and central nervous system.
CARCINOGENICITY: NTP? No IARC Monographs? No OSHA Regulated? No
RECOMMENDED EXPOSURE LIMITS
See "Section II"
LD 50 / LC 50
No toxicity data recorded


SECTION 12. ECOLOGICAL INFORMATION

GENERAL NOTES
Do not allow material to be released to the environment without official permits.


SECTION 13. DISPOSAL CONSIDERATIONS

WASTE DISPOSAL METHOD

Dispose of in accordance with local, state and federal regulations.


SECTION 14. TRANSPORT INFORMATION

DOT regulations:
Hazard class: 4.3
Identification number: UN2813
Packing group: III
Proper shipping name (technical name): Water-reactive solid, n.o.s. (Zirconium phosphide)
Land transport ADR/RID (cross-border)
ADR/RID class: 4.3 Substances which, in contact with water, emit flammable gases
Danger code (Kemler): 423
UN-Number: 2813
Description of goods: Water-reactive solid, n.o.s. (Zirconium phosphide)
Maritime transport IMDG:
IMDG Class: 4.3
UN Number: 2813
Packaging group: III
Proper shipping name: Water-reactive solid, n.o.s. (Zirconium phosphide)
Air transport ICAO-TI and IATA-DGR:
ICAO/IATA Class: 4.3
UN/ID Number: 2813
Packaging group: III
Proper shipping name: Water-reactive solid, n.o.s. (Zirconium phosphide)


SECTION 15. REGULATORY INFORMATION

CAS No. 7440-00-8 EINECS No. 2311093 EEC No. UN No. 2813 RTECS No. QO8575000
Hazard Indication FLAMMABLE SOLID ~ IRRITANT
Risk & Safety Phrases Highly flammable.
Irritating to eyes, respiratory system and skin.
Keep away from sources of ignition - No Smoking.
In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.
Take precautionary measures against static discharges.
Wear suitable protective clothing, gloves and eye/face protection.
TSCA Listed substance


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Zirconium Phosphide Sputtering Target

Phosphide IonAmerican Elements specializes in producing high purity Zirconium Phosphide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Zirconium as disc, granules, ingot, pellets, pieces, powder, and rod. Other shapes are available by request.

Chemical Identifiers

Linear Formula ZrP
MDL Number N/A
EC No. 234-866-8
Beilstein/Reaxys No. N/A
Pubchem CID 82860
IUPAC Name phosphanylidynezirconium
SMILES P#[Zr]
InchI Identifier InChI=1S/P.Zr
InchI Key VQYKQHDWCVUGBB-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

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Related Elements

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

Phosphorus

Phosphorus Bohr ModelSee more Phosphorus products. Phosphorus (atomic symbol: P, atomic number: 15) is a Block P, Group 15, Period 3 element. The number of electrons in each of Phosphorus's shells is 2, 8, 5 and its electronic configuration is [Ne] 3s2 3p3. The phosphorus atom has a radius of 110.5.pm and its Van der Waals radius is 180.pm. Phosphorus is a highly-reactive non-metallic element (sometimes considered a metalloid) with two primary allotropes, white phosphorus and red phosphorus its black flaky appearance is similar to graphitic carbon. Compound forms of phosphorus include phosphates and phosphides. Phosphorous was first recognized as an element by Hennig Brand in 1669 its name (phosphorus mirabilis, or "bearer of light") was inspired from the brilliant glow emitted by its distillation.

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