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Tantalum Silicide Sputtering Target

CAS #:

Linear Formula:

TaSi2

MDL Number:

N/A

EC No.:

234-902-2

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Tantalum Silicide Sputtering Target
TA-S-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% Tantalum Silicide Sputtering Target
TA-S-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Tantalum Silicide Sputtering Target
TA-S-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Tantalum Silicide Sputtering Target
TA-S-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Tantalum Silicide Sputtering Target
TA-S-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Tantalum Silicide Sputtering Target
TA-S-05-ST
Pricing > SDS > Data Sheet >
Question? Ask an American Elements EngineerWHOLESALE/SKU 0000-742-6259

Tantalum Silicide Sputtering Target Properties

Compound Formula

Si2Ta

Molecular Weight

237.12

Appearance

Target

Density (Theoretical)

N/A

Exact Mass

236.901849

Monoisotopic Mass

236.901849

Tantalum Silicide Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 11/25/2017
Date Revised: 05/15/2015

SECTION 1. IDENTIFICATION

Product Name: Tantalum Silicide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. TA-S-02-ST , TA-S-025-ST , TA-S-03-ST , TA-S-035-ST , TA-S-04-ST , TA-S-05-ST

CAS #: 12039-79-1

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America +1 800-424-9300
International +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
The substance is not classified according to the Globally Harmonized System (GHS).
Hazards not otherwise classified
No information known.
Label elements
GHS label elements
Not applicable
Hazard pictograms
Not applicable
Signal word
Not applicable
Hazard statements
Not applicable
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 1
Flammability = 0
Physical Hazard = 1
Other hazards
Results of PBT and vPvB assessment
PBT:
Not applicable.
vPvB:
Not applicable.


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Chemical characterization: Substances
CAS# Description:
12039-79-1 Tantalum disilicide
Identification number(s):
EC number: 234-902-2


SECTION 4. FIRST AID MEASURES

Description of first aid measures
After inhalation
Supply fresh air. If required, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
After skin contact
Immediately wash with water and soap and rinse thoroughly.
Seek immediate medical advice.
After eye contact
Rinse opened eye for several minutes under running water. Then consult a doctor.
After swallowing
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No further relevant information available.
Indication of any immediate medical attention and special treatment needed
No further relevant information available.


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Metal oxide fume
Silicon oxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Wear protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without proper governmental permits.
Methods and material for containment and cleaning up:
Pick up mechanically.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Storage
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Store away from oxidizing agents.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well sealed containers.
Specific end use(s)
No further relevant information available.


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Components with limit values that require monitoring at the workplace:
Tantalum
mg/m3
ACGIH TLV 5
Austria MAK 5
Belgium TWA 5
Denmark TWA 5
Finland TWA 5
France VME 5
Germany MAK 5
Korea TLV 5
Netherlands MAC-TGG 5
Poland TWA 5
Russia 10-STEL
Switzerland MAK-W 5
United Kingdom TWA 5; 10-STEL
USA PEL 5
Control parameters
Components with limit values that require monitoring at the workplace:
The product does not contain any relevant quantities of materials with critical values that have to be monitored at the workplace.
Additional information:
No data
Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures for handling chemicals should be followed.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Check protective gloves prior to each use for their proper condition.
The selection of suitable gloves not only depends on the material, but also on quality. Quality will vary from manufacturer to manufacturer.
Penetration time of glove material (in minutes)
Not determined
Eye protection:
Safety glasses
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
General Information
Appearance:
Form: Powder
Odor: Not determined
Odor threshold: Not determined.
pH-value: Not applicable.
Change in condition
Melting point/Melting range: 2200 °C (3992 °F)
Boiling point/Boiling range: Not determined
Sublimation temperature / start: Not determined
Flash point: Not applicable
Flammability (solid, gaseous)
Not determined.
Ignition temperature: Not determined
Decomposition temperature: Not determined
Auto igniting: Not determined.
Danger of explosion: Product does not present an explosion hazard.
Explosion limits:
Lower: Not determined
Upper: Not determined
Vapor pressure: Not applicable.
Density: Not determined
Relative density
Not determined.
Vapor density
Not applicable.
Evaporation rate
Not applicable.
Solubility in / Miscibility with Water: Not determined
Partition coefficient (n-octanol/water): Not determined.
Viscosity:
dynamic: Not applicable.
kinematic: Not applicable.
Other information
No further relevant information available.


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No information known.
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No further relevant information available.
Incompatible materials:
Oxidizing agents
Hazardous decomposition products:
Metal oxide fume
Silicon oxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
No effects known.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
May cause irritation
Eye irritation or corrosion:
May cause irritation
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
Tantalum compounds may cause skin and eye irritation.
Inorganic silicon compounds may be acute inhalation irritants. Prolonged inhalation may cause pulmonary fibrosis known as silicosis.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No further relevant information available.
Persistence and degradability
No further relevant information available.
Bioaccumulative potential
No further relevant information available.
Mobility in soil
No further relevant information available.
Additional ecological information:
General notes:
Do not allow material to be released to the environment without proper governmental permits.
Do not allow undiluted product or large quantities to reach ground water, water course or sewage system.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
Not applicable.
vPvB:
Not applicable.
Other adverse effects
No further relevant information available.


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult state, local or national regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

Not a hazardous material for transportation.
UN-Number
DOT, IMDG, IATA
None
UN proper shipping name
DOT, IMDG, IATA
None
Transport hazard class(es)
DOT, ADR, IMDG, IATA
Class
None
Packing group
DOT, IMDG, IATA
None
Environmental hazards:
Not applicable.
Special precautions for user
Not applicable.
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
Not applicable.
Transport/Additional information:
Not dangerous according to the above specifications.
DOT
Marine Pollutant (DOT):
No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS label elements
Not applicable
Hazard pictograms
Not applicable
Signal word
Not applicable
Hazard statements
Not applicable
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Non-Domestic Substances List (NDSL).
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2016 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Tantalum Silicide Sputtering Target

American Elements specializes in producing high purity Tantalum Silicide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Tantalum as rods, powder and plates. Other shapes are available by request.

Tantalum Silicide Sputtering Target Chemical Identifiers

Linear Formula

TaSi2

Pubchem CID

6336888

MDL Number

N/A

EC No.

234-902-2

Beilstein Registry No.

N/A

IUPAC Name

bis($l^{2}-silanylidene)tantalum

SMILES

[Si]=[Ta]=[Si]

InchI Identifier

InChI=1S/2Si.Ta

InchI Key

MANYRMJQFFSZKJ-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Related Elements

See more Silicon products. Silicon (atomic symbol: Si, atomic number: 14) is a Block P, Group 14, Period 3 element with an atomic weight of 28.085. Silicon Bohr MoleculeThe number of electrons in each of Silicon's shells is 2, 8, 4 and its electron configuration is [Ne] 3s2 3p2. The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm. Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823. Silicon makes up 25.7% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen. The metalloid is rarely found in pure crystal form and is usually produced from the iron-silicon alloy ferrosilicon. Elemental SiliconSilica (or silicon dioxide), as sand, is a principal ingredient of glass, one of the most inexpensive of materials with excellent mechanical, optical, thermal, and electrical properties. Ultra high purity silicon can be doped with boron, gallium, phosphorus, or arsenic to produce silicon for use in transistors, solar cells, rectifiers, and other solid-state devices which are used extensively in the electronics industry.The name Silicon originates from the Latin word silex which means flint or hard stone.

See more Tantalum products. Tantalum (atomic symbol: Ta, atomic number: 73) is a Block D, Group 5, Period 6 element with an atomic weight of 180.94788. Tantalum Bohr ModelThe number of electrons in each of tantalum's shells is [2, 8, 18, 32, 11, 2] and its electron configuration is [Xe] 4f14 5d3 6s2. The tantalum atom has a radius of 146 pm and a Van der Waals radius of 217 pm. High Purity (99.999%) Tantalum (Ta) MetalTantalum was first discovered by Anders G. Ekeberg in 1802 in Uppsala, Sweden however, it was not until 1844 when Heinrich Rose first recognized it as a distinct element. In its elemental form, tantalum has a grayish blue appearance. Tantalum is found in the minerals tantalite, microlite, wodginite, euxenite, and polycrase. Due to the close relation of tantalum to niobium in the periodic table, Tantalum's name originates from the Greek word Tantalos meaning Father of Niobe in Greek mythology.

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