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Titanium Disilicide Sputtering Target

CAS #:

Linear Formula:

TiSi2

MDL Number:

N/A

EC No.:

234-904-3

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Titanium Disilicide Sputtering Target
TI-SID2-02-ST
Pricing > SDS > Data Sheet >
(2N5) 99.5% Titanium Disilicide Sputtering Target
TI-SID2-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Titanium Disilicide Sputtering Target
TI-SID2-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Titanium Disilicide Sputtering Target
TI-SID2-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Titanium Disilicide Sputtering Target
TI-SID2-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Titanium Disilicide Sputtering Target
TI-SID2-05-ST
Pricing > SDS > Data Sheet >

Titanium Disilicide Sputtering Target Properties (Theoretical)

Compound Formula Si2Ti
Molecular Weight 104.04
Appearance solid
Melting Point N/A
Boiling Point N/A
Density 4.02 g/cm3
Solubility in H2O N/A
Exact Mass 103.9018
Monoisotopic Mass 103.9018

Titanium Disilicide Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 11/11/2019
Date Revised: 05/15/2015

SECTION 1. IDENTIFICATION

Product Name: Titanium Disilicide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. TI-SID2-02-ST 02 , TI-SID2-025-ST 025 , TI-SID2-03-ST 03 , TI-SID2-035-ST 035 , TI-SID2-04-ST 04 , TI-SID2-05-ST 05

CAS #: 12039-83-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
GHS02 Flame
Flam. Sol. 2 H228 Flammable solid.
GHS07
Skin Irrit. 2 H315 Causes skin irritation.
Eye Irrit. 2A H319 Causes serious eye irritation.
STOT SE 3 H335 May cause respiratory irritation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
Xi; Irritant
R36/37/38: Irritating to eyes, respiratory system and skin.
F; Highly flammable
R11: Highly flammable.
Information concerning particular hazards for human and environment:
N/A
Hazards not otherwise classified
No data available
Label elements
Labelling according to Regulation (EC) No 1272/2008
The substance is classified and labeled according to the CLP regulation.
Hazard pictograms

Flame - GHS02 Exclamation Mark - GHS07

GHS02
GHS07
Signal word
Warning
Hazard statements
H228 Flammable solid.
H315 Causes skin irritation.
H319 Causes serious eye irritation.
H335 May cause respiratory irritation.
Precautionary statements
P210 Keep away from heat/sparks/open flames/hot surfaces. No smoking.
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/
national/international regulations.
WHMIS classification
B4 - Flammable solid
D2B - Toxic material causing other toxic effects
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
1
2
2
Health (acute effects) = 1
Flammability = 2
Physical Hazard = 2
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
12039-83-7 Titanium silicide
Identification number(s):
EC number:
234-904-3


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No data available
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
CO2, sand, extinguishing powder. Do not use water.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Metal oxide fume
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Keep away from ignition sources
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Do not allow product to enter drains, sewage systems, or other water courses.
Do not allow material to penetrate the ground or soil.
Methods and materials for containment and cleanup:
Keep away from ignition sources.
Ensure adequate ventilation.
Prevention of secondary hazards:
Keep away from ignition sources.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires:
Protect against electrostatic charges.
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles:
Store in a cool location.
Information about storage in one common storage facility:
Store away from oxidizing agents.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
Not required.
Additional information:
No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Avoid contact with the eyes and skin.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Eye protection:
Safety glasses
Body protection:
Protective work clothing


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Solid
Color: Black
Odor: No data available
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 1760 °C (3200 °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flash point: N/A
Flammability (solid, gas)
Highly flammable.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20 °C (68 °F): 4.39 g/cm3 (36.635 lbs/gal)
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No data available
Incompatible materials:
Bases
Oxidizing agents
Hazardous decomposition products:
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
No effects known.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
Causes skin irritation.
Eye irritation or corrosion:
Causes serious eye irritation.
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
May cause respiratory irritation.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
Inorganic silicon compounds may be acute inhalation irritants. Prolonged inhalation may
cause pulmonary fibrosis known as silicosis.
Titanium compounds are considered physiologically inert. There are no reported cases in the literature where titanium as such has caused human intoxication.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, IMDG, IATA
UN3178
UN proper shipping name
DOT
Flammable solid, inorganic, n.o.s. (Titanium silicide)
IMDG, IATA
FLAMMABLE SOLID, INORGANIC, N.O.S. (Titanium silicide)
Transport hazard class(es)
DOT
Class
4.1 Flammable solids, self-reactive substances and solid desensitised explosives.
Label
4.1
Class
4.1 (F3) Flammable solids, self-reactive substances and solid desensitised explosives
Label
4.1
IMDG, IATA
Class
4.1 Flammable solids, self-reactive substances and solid desensitised explosives.
Label
4.1
Packing group
DOT, IMDG, IATA
III
Environmental hazards:
N/A
Special precautions for user
Warning: Flammable solids, self-reactive substances and solid desensitised explosives
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No
UN "Model Regulation":
UN3178, Flammable solid, inorganic, n.o.s. (Titanium silicide), 4.1, III


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
REACH - Pre-registered substances
Substance is listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2018 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Titanium Disilicide Sputtering Target

American Elements specializes in producing high purity Titanium Disilicide Sputtering Targets with the highest possible density High Purity (99.99%) Titanium Disilicide Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Titanium as rods, powder and plates. Other shapes are available by request.

Titanium Disilicide Sputtering Target Synonyms

N/A

Chemical Identifiers

Linear Formula TiSi2
MDL Number N/A
EC No. 234-904-3
Beilstein Registry No. N/A
Pubchem CID 6336889
IUPAC Name bis($l^{2}-silanylidene)titanium
SMILES [Si]=[Ti]=[Si]
InchI Identifier InChI=1S/2Si.Ti
InchI Key DFJQEGUNXWZVAH-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

See more Titanium products. Titanium (atomic symbol: Ti, atomic number: 22) is a Block D, Group 4, Period 4 element with an atomic weight of 47.867. The number of electrons in each of Titanium's shells is [2, 8, 10, 2] and its electron configuration is [Ar] 3d2 4s2. Titanium Bohr ModelThe titanium atom has a radius of 147 pm and a Van der Waals radius of 187 pm. Titanium was discovered by William Gregor in 1791 and first isolated by Jöns Jakob Berzelius in 1825. In its elemental form, titanium has a silvery grey-white metallic appearance. Titanium's properties are chemically and physically similar to zirconium, both of which have the same number of valence electrons and are in the same group in the periodic table. Elemental TitaniumTitanium has five naturally occurring isotopes: 46Ti through 50Ti, with 48Ti being the most abundant (73.8%). Titanium is found in igneous rocks and the sediments derived from them. It is named after the word Titanos, which is Greek for Titans.

See more Silicon products. Silicon (atomic symbol: Si, atomic number: 14) is a Block P, Group 14, Period 3 element with an atomic weight of 28.085. Silicon Bohr MoleculeThe number of electrons in each of Silicon's shells is 2, 8, 4 and its electron configuration is [Ne] 3s2 3p2. The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm. Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823. Silicon makes up 25.7% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen. The metalloid is rarely found in pure crystal form and is usually produced from the iron-silicon alloy ferrosilicon. Elemental SiliconSilica (or silicon dioxide), as sand, is a principal ingredient of glass, one of the most inexpensive of materials with excellent mechanical, optical, thermal, and electrical properties. Ultra high purity silicon can be doped with boron, gallium, phosphorus, or arsenic to produce silicon for use in transistors, solar cells, rectifiers, and other solid-state devices which are used extensively in the electronics industry.The name Silicon originates from the Latin word silex which means flint or hard stone.

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