Shallow Heavily Doped n++ Germanium by Organo-Antimony Monolayer Doping.

Title Shallow Heavily Doped n++ Germanium by Organo-Antimony Monolayer Doping.
Authors T. Alphazan; A.Díaz Álvarez; F. Martin; H. Grampeix; V. Enyedi; E. Martinez; N. Rochat; M. Veillerot; M. Dewitte; J.P. Nys; M. Berthe; D. Stiévenard; C. Thieuleux; B. Grandidier
Journal ACS Appl Mater Interfaces
DOI 10.1021/acsami.7b02645
Abstract

Functionalization of Ge surfaces with the aim of incorporating specific dopant atoms to form high-quality junctions is of particular importance for the development of solid-state devices. In this study, we report the shallow doping of Ge wafers with a monolayer doping strategy that is based on the controlled grafting of Sb precursors and the subsequent diffusion of Sb into the wafer upon annealing. We also highlight the key role of citric acid in passivating the surface before its reaction with the Sb precursors and the benefit of a protective SiO2 overlayer that enables an efficient incorporation of Sb dopants with a concentration higher than 10(20) cm(-3). Microscopic four-point probe measurements and photoconductivity experiments show the full electrical activation of the Sb dopants, giving rise to the formation of an n++ Sb-doped layer and an enhanced local field-effect passivation at the surface of the Ge wafer.

Citation T. Alphazan; A.Díaz Álvarez; F. Martin; H. Grampeix; V. Enyedi; E. Martinez; N. Rochat; M. Veillerot; M. Dewitte; J.P. Nys; M. Berthe; D. Stiévenard; C. Thieuleux; B. Grandidier.Shallow Heavily Doped n++ Germanium by Organo-Antimony Monolayer Doping.. ACS Appl Mater Interfaces. 2017. doi:10.1021/acsami.7b02645

Related Elements

Antimony

See more Antimony products. Antimony (atomic symbol: Sb, atomic number: 51) is a Block P, Group 15, Period 5 element with an atomic radius of 121.760. Antimony Bohr Model The number of electrons in each of antimony's shells is 2, 8, 18, 18, 5 and its electron configuration is [Kr] 4d10 5s2 5p3. The antimony atom has a radius of 140 pm and a Van der Waals radius of 206 pm. Antimony was discovered around 3000 BC and first isolated by Vannoccio Biringuccio in 1540 AD. In its elemental form, antimony has a silvery lustrous gray appearance. Elemental Antimony The most common source of antimony is the sulfide mineral known as stibnite (Sb2S3), although it sometimes occurs natively as well. Antimony has numerous applications, most commonly in flame-retardant materials. It also increases the hardness and strength of lead when combined in an alloy and is frequently employed as a dopant in semiconductor materials. Its name is derived from the Greek words anti and monos, meaning a metal not found by itself.

Germanium

See more Germanium products. Germanium (atomic symbol: Ge, atomic number: 32) is a Block P, Group 14, Period 4 element with an atomic weight of 72.63. Germanium Bohr ModelThe number of electrons in each of germanium's shells is 2, 8, 18, 4 and its electron configuration is [Ar] 3d10 4s2 4p2. The germanium atom has a radius of 122.5 pm and a Van der Waals radius of 211 pm. Germanium was first discovered by Clemens Winkler in 1886. In its elemental form, germanium is a brittle grayish white semi-metallic element. Germanium is too reactive to be found naturally on Earth in its native state. High Purity (99.999%) Germanium (Ge) MetalIt is commercially obtained from zinc ores and certain coals. It is also found in argyrodite and germanite. It is used extensively as a semiconductor in transitors, solar cells, and optical materials. Other applications include acting an alloying agent, as a phosphor in fluorescent lamps, and as a catalyst. The name Germanium originates from the Latin word "Germania" meaning "Germany."