Zirconium Silicate Sputtering Target

CAS #:

Linear Formula:

ZrSiO4

MDL Number:

MFCD00085353

EC No.:

233-252-7

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Zirconium Silicate Sputtering Target
ZR-SIAT-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Zirconium Silicate Sputtering Target
ZR-SIAT-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Zirconium Silicate Sputtering Target
ZR-SIAT-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Zirconium Silicate Sputtering Target
ZR-SIAT-05-ST
Pricing > SDS > Data Sheet >

Zirconium Silicate Sputtering Target Properties (Theoretical)

Compound Formula O4SiZr
Molecular Weight 183.31
Appearance Off-white solid
Melting Point 2550 °C
Boiling Point N/A
Density 3.9 g/cm3
Solubility in H2O N/A
Tensile Strength 290 MPa (Ultimate)
Thermal Conductivity 3.5 W/m-K
Thermal Expansion 5.0 µm/m-K
Exact Mass 181.861289
Monoisotopic Mass 181.861289

Zirconium Silicate Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H315-H319-H332-H335
Hazard Codes Xn
Risk Codes 20-36/37/38
Safety Statements 26-36
RTECS Number N/A
Transport Information N/A
WGK Germany 3

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/09/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Zirconium Silicate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. ZR-SIAT-02-ST , ZR-SIAT-03-ST , ZR-SIAT-04-ST , ZR-SIAT-05-ST

CAS #: 10101-52-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
GHS07
Skin Irrit. 2 H315 Causes skin irritation.
Eye Irrit. 2A H319 Causes serious eye irritation.
STOT SE 3 H335 May cause respiratory irritation.
Hazards not otherwise classified No data available
GHS label elements, including precautionary statements

Exclamation Mark - GHS07

Hazard pictograms
GHS07
Signal word Warning
Hazard statements
H315 Causes skin irritation.
H319 Causes serious eye irritation.
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
WHMIS classification
D2B - Toxic material causing other toxic effects
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
1

1
Health (acute effects) = 1
Flammability = 0
Physical Hazard = 1
Other hazards
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
10101-52-7 Zirconium silicate
Identification number(s):
EC number: 233-252-7


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed:
No data available
Indication of any immediate medical attention and special treatment needed:
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Silicon oxide
Metal oxide fume
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions: Do not allow product to enter drains, sewage systems, or other water courses.
Methods and materials for containment and cleanup: Ensure adequate ventilation.
Prevention of secondary hazards: No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires: The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles: No special requirements.
Information about storage in one common storage facility: Store away from oxidizing agents.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s) No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
10101-52-7 Zirconium silicate (100.0%)
PEL (USA) Long-term value: 5 mg/m3
as Zr
TLV (USA) Short-term value: 10 mg/m3
Long-term value: 5 mg/m3
as Zr
Additional information: No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Avoid contact with the eyes and skin.
Maintain an ergonomically appropriate working environment.
Breathing equipment: Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
The selection of suitable gloves not only depends on the material, but also on quality. Quality will vary from manufacturer to manufacturer.
Penetration time of glove material (in minutes) No data available
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Powder
Color: White
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 2550 °C (4622 °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flammability (solid, gas) No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20 °C (68 °F): 4.56 g/cm3 (38.053 lbs/gal)
Relative density No data available.
Vapor density N/A
Evaporation rate N/A
Solubility in / Miscibility with
Water: Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity No data available
Chemical stability Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided: Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions Reacts with strong oxidizing agents
Conditions to avoid No data available
Incompatible materials: Oxidizing agents
Hazardous decomposition products:
Silicon oxide
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity: No effects known.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: Causes skin irritation.
Eye irritation or corrosion: Causes serious eye irritation.
Sensitization: No sensitizing effects known.
Germ cell mutagenicity: No effects known.
Carcinogenicity:
ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in terms of its carcinogenicity in humans and/or animals.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: May cause respiratory irritation.
Aspiration hazard: No effects known.
Subacute to chronic toxicity: No effects known.
Additional toxicological information: To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity: No data available
Persistence and degradability No data available
Bioaccumulative potential No data available
Mobility in soil No data available
Additional ecological information: Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A
Other adverse effects No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation: Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

DOT, ADN, IMDG, IATA N/A
UN proper shipping name
DOT, ADN, IMDG, IATA N/A
Transport hazard class(es)
DOT, ADR, ADN, IMDG, IATA
Class N/A
Packing group
DOT, IMDG, IATA N/A
Environmental hazards: N/A
Special precautions for user N/A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT): No
UN "Model Regulation": -


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS label elements, including precautionary statements
Hazard pictograms
GHS07
Signal word Warning
Hazard statements
H315 Causes skin irritation.
H319 Causes serious eye irritation.
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings) Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer Substance is not listed.
Prop 65 - Developmental toxicity Substance is not listed.
Prop 65 - Developmental toxicity, female Substance is not listed.
Prop 65 - Developmental toxicity, male Substance is not listed.
Information about limitation of use: For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006. Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the
market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use) Substance is not listed.
Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Zirconium Silicate Sputtering Target

American Elements specializes in producing high purity Zirconium Silicate Sputtering Targets with the highest possible density High Purity (99.99%) Zirconium Silicate Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Zirconium Silicate Sputtering Target Synonyms

Zirconium(IV) silicate, 14940-68-2, Zirconium orthosilicate, Zirconium(4+) orthosilicate, Zirconium(IV) orthosilicate, Zircon, Zircon flour, Zirconium silicon oxide, Silicic acid, zirconium(4+) salt (1:1), Zirconite, Hyacinth

Chemical Identifiers

Linear Formula ZrSiO4
MDL Number MFCD00085353
EC No. 233-252-7
Beilstein/Reaxys No. N/A
Pubchem CID 61775
IUPAC Name zirconium(4+); silicate
SMILES [Zr+4].[O-][Si]([O-])([O-])[O-]
InchI Identifier InChI=1S/O4Si.Zr/c1-5(2,3)4;/q-4;+4
InchI Key GFQYVLUOOAAOGM-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

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For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

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