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Yttrium Aluminum Oxide Sputtering Target |
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Y3Al5O12 |
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American Elements specializes in producing high purity Yttrium Aluminum Oxide sputtering targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Induction Plasma Spectrometry (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar or plate form, as well as other machined shapes and through other processes such as nanoparticles (See also application discussion at Nanotechnology Information and at Quantum Dots) and in the form of solutions and organometallics. Oxide compounds are not conductive to electricity. However, certain perovskite structured oxides are electronically conductive finding application in the cathode of solid oxide fuel cells and oxygen generation systems. Other shapes are available by request.
Yttrium is a Block D, Group 3, Period 5 element. The electronic configuration is [Kr] 4d1 5s2. In its elemental form yttrium's CAS number is 7440-65-5. The yttrium atom has a radius of 177.6.pm and it's Van der Waals radius is 200.pm. Yttrium has the highest thermo-dynamic affinity for oxygen of any element. This characteristic is the basis for many of its applications. While not part of the rare earth series, it resembles the heavy rare earths which are sometimes referred to as the “yttrics” for this reason. Another unique characteristic derives from its ability to form crystals with useful properties. Yttrium is available as metal and compounds with purities from 99% to 99.999% (ACS grade to ultra high purity); metals in the form of foil, sputtering target, and rod, and compounds as submicron and nanopowder. Aluminum is a Block P, Group 13, Period 3 element. The electronic configuration is [Ne] 3s2 3p1. In its elemental form aluminum's CAS number is 7429-90-5. The aluminum atom has a radius of 143.2.pm and it's Van der Waals radius is 200.pm. Aluminum is a silvery-white metal that possesses many desirable characteristics. It is light, nonmagnetic and nonsparking. It stands second among metals in the scale of malleability, and sixth in ductility. It is extensively used in many industrial applications where a strong, light, easily constructed material is needed. Although it's electrical conductivity is only about 60% that of copper, it is used in electrical transmission lines because of its light weight. Pure aluminum is soft and lacks strength, but alloyed with small amounts of copper, magnesium, silicon, manganese, or other elements impart a variety of useful properties. These alloys are of vital importance in the construction of modern aircraft and rockets. Aluminum, evaporated in a vacuum, forms a highly reflective coating for both visible light and radiant heat. |
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© 2001-2008. American Elements is a U.S. Registered Trademark. All rights reserved. This website and all pages, designs, concepts, logos, and color schemes herein are the copyrighted proprietary rights and intellectual property of American Elements. |
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