CAS #:

Linear Formula:

AlPO4

MDL Number:

MFCD00003430

EC No.:

232-056-9

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PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Aluminum Phosphate Sputtering Target
AL-PAT-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Aluminum Phosphate Sputtering Target
AL-PAT-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Aluminum Phosphate Sputtering Target
AL-PAT-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Aluminum Phosphate Sputtering Target
AL-PAT-05-ST
Pricing > SDS > Data Sheet >

Aluminum Phosphate Sputtering Target Properties (Theoretical)

Compound Formula AlO4P
Molecular Weight 121.95
Appearance White solid
Melting Point N/A
Boiling Point N/A
Density 2.56 g/cm3
Solubility in H2O N/A
Exact Mass 121.934958
Monoisotopic Mass 121.934958

Aluminum Phosphate Sputtering Target Health & Safety Information

Signal Word Danger
Hazard Statements H314
Hazard Codes C
Risk Codes 34
Safety Statements 26-36/37/39-45
RTECS Number TB6450000
Transport Information UN 3260 8/PG 2
WGK Germany 1

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 03/18/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Aluminum Phosphate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. AL-PAT-02-ST , AL-PAT-03-ST , AL-PAT-04-ST , AL-PAT-05-ST

CAS #: 7784-30-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
GHS05 Corrosion
Skin Corr. 1B H314 Causes severe skin burns and eye damage.
Eye Dam. 1
H318 Causes serious eye damage.
Hazards not otherwise classified
No data available
GHS label elements
GHS label elements, including precautionary statements
Hazard pictograms

Corrosion - GHS05

GHS05
Signal word
Danger
Hazard statements
H314 Causes severe skin burns and eye damage.
Precautionary statements
P260
Do not breathe dust/fume/gas/mist/vapors/spray.
P303+P361+P353 If on skin (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P301+P330+P331 IF SWALLOWED: rinse mouth. Do NOT induce vomiting.
P405
Store locked up.
P501
Dispose of contents/container in accordance with local/regional/national/international regulations.
WHMIS classification
D2B - Toxic material causing other toxic effects
E - Corrosive material
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 3
Flammability = 0
Physical Hazard = 1
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
7784-30-7 Aluminum phosphate
Identification number(s):
EC number: 232-056-9


SECTION 4. FIRST AID MEASURES

Description of first aid measures
General information
Immediately remove any clothing soiled by the product.
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
Causes severe skin burns.
Causes serious eye damage.
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Phosphorus oxides
Aluminum oxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Methods and materials for containment and cleanup:
Use neutralizing agent.
Dispose of contaminated material as waste according to section 13.
Ensure adequate ventilation.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Store away from oxidizing agents.
Store away from strong bases.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
7784-30-7 Aluminum phosphate (100.0%)
PEL (USA) Long-term value: 15*, 5** mg/m3
*total dust, as Al; **respirable fraction, as Al
TLV (USA) Long-term value: 1 mg/m3 respirable fraction, as Al
Additional information:
No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Avoid contact with the eyes and skin.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Recommended filter device for short term use:
Use a respirator with type P100 (USA) or P3 (EN 143) cartridges as a backup to engineering controls. Risk assessment should be performed to determine if air-purifying respirators are appropriate. Only use equipment tested and approved under appropriate government standards.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Penetration time of glove material (in minutes)
No data available
Eye protection:
Tightly sealed goggles
Full face protection
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Crystalline powder
Color: White
Odor: No data available
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: >1500° °C (>2732° °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flammability (solid, gas)
No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20 °C (68 °F): 2.566 g/cm3 (21.413 lbs/gal)
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No data available
Incompatible materials:
Oxidizing agents
Bases
Hazardous decomposition products:
Phosphorus oxides (e.g. P2O5)
Aluminum oxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
Swallowing will lead to a strong corrosive effect on mouth and throat and to the danger of perforation of esophagus and stomach.
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for this substance.
LD/LC50 values that are relevant for classification:
Oral
LD50 >5 gm/kg (mouse)
Dermal LD50 >4640 mg/kg (rabbit)
Skin irritation or corrosion:
Causes severe skin burns.
Eye irritation or corrosion:
Causes serious eye damage.
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in terms of its carcinogenicity in humans and/or animals.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains multiple dose toxicity data for this substance.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage systems.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, IMDG, IATA
UN3260
UN proper shipping name
DOT
Corrosive solid, acidic, inorganic, n.o.s. (Aluminum phosphate)
IMDG, IATA
CORROSIVE SOLID, ACIDIC, INORGANIC, N.O.S. (Aluminum phosphate)
Transport hazard class(es)
DOT
Class
8 Corrosive substances.
Label
8
Class
8 (C2) Corrosive substances
Label
8
IMDG, IATA
Class
8 Corrosive substances.
Label
8
Packing group
DOT, IMDG, IATA
III
Environmental hazards:
N/A
Special precautions for user
Warning: Corrosive substances
EMS Number: F-A,S-B
Segregation groups
Acids
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No
UN "Model Regulation":
UN3260, Corrosive solid, acidic, inorganic, n.o.s. (Aluminum phosphate), 8, III


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS GHS label elements, including precautionary statements
Hazard pictograms
GHS05
Signal word
Danger
Hazard statements
H314 Causes severe skin burns and eye damage.
Precautionary statements
P260
Do not breathe dust/fume/gas/mist/vapors/spray.
P303+P361+P353 If on skin (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P301+P330+P331 IF SWALLOWED: rinse mouth. Do NOT induce vomiting.
P405
Store locked up.
P501
Dispose of contents/container in accordance with local/regional/national/international regulations.
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
This substance is subject to a Significant New Use Rule (SNUR) promulgated under
Section 5(a)(2) of the Toxic Substances Control Act (TSCA). See 40 CFR 721.
This product is being sold for research and development use.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Aluminum Phosphate Sputtering Target

American Elements specializes in producing high purity Aluminum Phosphate Sputtering Targets with the highest possible density High Purity (99.99%) Aluminum Phosphate Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Aluminum Phosphate Sputtering Target Synonyms

Aluminum monophosphate, Aluminum acid phosphate, Aluminophosphoric acid, Monoaluminum phosphate, aluminum orthophosphate

Chemical Identifiers

Linear Formula AlPO4
MDL Number MFCD00003430
EC No. 232-056-9
Beilstein/Reaxys No. N/A
Pubchem CID 64655
IUPAC Name aluminum phosphate
SMILES [Al+3].[O-]P([O-])([O-])=O
InchI Identifier InChI=1S/Al.H3O4P/c;1-5(2,3)4/h;(H3,1,2,3,4)/q+3;/p-3
InchI Key ILRRQNADMUWWFW-UHFFFAOYSA-K

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

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Phosphorus

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