CAS #:

Linear Formula:


MDL Number:


EC No.:



(2N) 99% Cerium(III) Phosphate Sputtering Target
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(3N) 99.9% Cerium(III) Phosphate Sputtering Target
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(4N) 99.99% Cerium(III) Phosphate Sputtering Target
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(5N) 99.999% Cerium(III) Phosphate Sputtering Target
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Cerium(III) Phosphate Sputtering Target Properties (Theoretical)

Compound Formula CeO4P
Molecular Weight 235.087
Appearance White to yellow solid
Melting Point N/A
Boiling Point 158 °C
Density 5.22 g/cm3
Solubility in H2O N/A
Exact Mass 234.858859
Monoisotopic Mass 234.858859

Cerium(III) Phosphate Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Precautionary Statements P262-P280-P305+P351+P338-P304+P340-P403+P233-P501
Risk Codes N/A
Safety Statements N/A
Transport Information NONH for all modes of transport

View and Print SDS


Date Accessed: 02/27/2024
Date Revised:01/15/2022


Product Name: Cerium(III) Phosphate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. CE-PAT-02-ST , CE-PAT-03-ST , CE-PAT-04-ST , CE-PAT-05-ST

CAS #: 13454-71-2

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


Classification of the substance or mixture
The substance is not classified according to the Globally Harmonized System (GHS).
Label elements
GHS label elements not applicable
Hazard pictograms not applicable
Signal word not applicable
Hazard statements not applicable
Precautionary statements
P262 Do not get in eyes, on skin, or on clothing.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 If in eyes: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P403+P233 Store in a well-ventilated place. Keep container tightly closed.
P501 Dispose of contents/container in accordance with local/regional/national/international


Chemical characterization: Substances
CAS No. Description
13454-71-2 Cerium(III) phosphate hydrate
Identification number(s)
EC number: 236-637-8


Description of first aid measures
General information: No special measures required.
After inhalation: Supply fresh air; consult doctor in case of complaints.
After skin contact: Immediately rinse with water.
After eye contact: Rinse opened eye for several minutes under running water. Then consult a doctor.
After swallowing: If symptoms persist consult doctor.
Information for doctor:
Most important symptoms and effects, both acute and delayed No further relevant information available.
Indication of any immediate medical attention and special treatment needed
No further relevant information available.


Extinguishing media
Suitable extinguishing agents:
CO2, extinguishing powder or water spray. Fight larger fires with water spray or alcohol resistant foam.
Special hazards arising from the substance or mixture No further relevant information available.
Advice for firefighters
Protective equipment: No special measures required.


Personal precautions, protective equipment and emergency procedures Not required.
Environmental precautions: No special measures required.
Methods and material for containment and cleaning up:
Dispose contaminated material as waste according to item 13.
Reference to other sections
See Section 7 for information on safe handling.
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


Precautions for safe handling No special measures required.
Information about protection against explosions and fires: No special measures required.
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles: No special requirements.
Information about storage in one common storage facility: Not required.
Further information about storage conditions: None.
Specific end use(s) No further relevant information available.


Additional information about design of technical systems: No further data; see item 7.
Control parameters
Components with limit values that require monitoring at the workplace: Not required.
Additional information: The lists that were valid during the creation were used as basis.
Exposure controls
Personal protective equipment:
General protective and hygienic measures:
The usual precautionary measures for handling chemicals should be followed.
Breathing equipment: Not required.
Protection of hands: Protective gloves
The glove material has to be impermeable and resistant to the product/ the substance/ the preparation.
Due to missing tests no recommendation to the glove material can be given for the product/ the preparation/ the
chemical mixture.
Selection of the glove material on consideration of the penetration times, rates of diffusion and the degradation
Material of gloves
The selection of the suitable gloves does not only depend on the material, but also on further marks of quality and varies from manufacturer to manufacturer.
Penetration time of glove material
The exact break through time has to be found out by the manufacturer of the protective gloves and has to be observed.
Eye protection: Safety glasses


Information on basic physical and chemical properties
General Information
Form: Powder
Color: Whitish
Odor: Odorless
Odor threshold: Not determined.
pH-value: Not applicable.
Change in condition
Melting point/Melting range: no data °C
Boiling point/Boiling range: no data °C
Flash point: Not applicable.
Flammability (solid, gaseous): Product is not flammable
Ignition temperature:
Decomposition temperature: Not determined.
Auto igniting: Not determined.
Danger of explosion: Product does not present an explosion hazard.
Explosion limits:
Lower: Not determined.
Upper: Not determined.
Vapor pressure: no data hPa
Density: Not determined.
Relative density Not determined.
Vapor density Not applicable.
Evaporation rate Not applicable.
Solubility in / Miscibility with
Water: Insoluble.
Partition coefficient (n-octanol/water): Not determined.
Dynamic: Not applicable.
Kinematic: Not applicable.
Solvent content:
Organic solvents: 0.0 %
VOC content: 0.0 g/l / 0.00 lb/gl
Solids content: 100.0 %
Other information No further relevant information available.


Reactivity No further relevant information available.
Chemical stability
Thermal decomposition / conditions to be avoided: No decomposition if used according to specifications.
Possibility of hazardous reactions No dangerous reactions known.
Conditions to avoid No further relevant information available.
Incompatible materials: No further relevant information available.
Hazardous decomposition products: No dangerous decomposition products known.


Information on toxicological effects
Acute toxicity:
Primary irritant effect:
on the skin: No irritant effect.
on the eye: No irritating effect.
Sensitization: No sensitizing effects known.
Additional toxicological information:
When used and handled according to specifications, the product does not have any harmful effects according to our experience and the information provided to us.
The substance is not subject to classification.
Carcinogenic categories
IARC (International Agency for Research on Cancer)
Substance is not listed.
NTP (National Toxicology Program)
Substance is not listed.
OSHA-Ca (Occupational Safety & Health Administration)
Substance is not listed.


Aquatic toxicity: No further relevant information available.
Persistence and degradability No further relevant information available.
Behavior in environmental systems:
Bioaccumulative potential No further relevant information available.
Mobility in soil No further relevant information available.
Additional ecological information:
General notes: Not known to be hazardous to water.
Results of PBT and vPvB assessment
PBT: Not applicable.
vPvB: Not applicable.
Other adverse effects No further relevant information available.


Waste treatment methods
Recommendation: Disposal must be made according to official regulations.
Uncleaned packagings:
Recommendation: Disposal must be made according to official regulations.


DOT, ADN, IMDG, IATA not regulated
UN proper shipping name
DOT, ADN, IMDG, IATA not regulated
Transport hazard class(es)
Class not regulated
Packing group
DOT, IMDG, IATA not regulated
Environmental hazards:
Marine pollutant: No
Special precautions for user Not applicable.
Transport in bulk according to Annex II of
MARPOL73/78 and the IBC Code Not applicable.
UN "Model Regulation": not regulated


Safety, health and environmental regulations/legislation specific for the substance or mixture
Section 355 (extremely hazardous substances):
Substance is not listed.
Section 313 (Specific toxic chemical listings):
Substance is not listed.
TSCA (Toxic Substances Control Act):
Substance is not listed.
Proposition 65
Chemicals known to cause cancer:
Substance is not listed.
Chemicals known to cause reproductive toxicity for females:
Substance is not listed.
Chemicals known to cause reproductive toxicity for males:
Substance is not listed.
Chemicals known to cause developmental toxicity:
Substance is not listed.
Carcinogenic categories
EPA (Environmental Protection Agency)
Substance is not listed.
TLV (Threshold Limit Value established by ACGIH)
Substance is not listed.
NIOSH-Ca (National Institute for Occupational Safety and Health)
Substance is not listed.
GHS label elements not applicable
Hazard pictograms not applicable
Signal word not applicable
Hazard statements not applicable
Precautionary statements
P262 Do not get in eyes, on skin, or on clothing.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 If in eyes: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P403+P233 Store in a well-ventilated place. Keep container tightly closed.
P501 Dispose of contents/container in accordance with local/regional/national/international
Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Cerium(III) Phosphate Sputtering Target

American Elements specializes in producing high purity Cerium(III) Phosphate Sputtering Targets with the highest possible density High Purity (99.99%) Cerium(III) Phosphate Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Cerium(III) Phosphate Sputtering Target Synonyms

Cerium(3+) phosphate; Cerium monophosphate; Cerium orthophosphate; Phosphoric acid cerium(3+) salt (1:1)

Chemical Identifiers

Linear Formula CePO4
MDL Number MFCD00049424
EC No. 236-637-8
Beilstein/Reaxys No. N/A
Pubchem CID 159673
IUPAC Name cerium(3+) ; phosphate
SMILES [Ce+3].[O-]P([O-])([O-])=O
InchI Identifier InChI=1S/Ce.H3O4P/c;1-5(2,3)4/h;(H3,1,2,3,4)/q+3;/p-3

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements


See more Cerium products. Cerium (atomic symbol: Ce, atomic number: 58) is a Block F, Group 3, Period 6 element with an atomic weight of 140.116. The number of electrons in each of cerium's shells is 2, 8, 18, 19, 9, 2 and its electron configuration is [Xe]4f2 6s2. Cerium Bohr ModelThe cerium atom has a radius of 182.5 pm and a Van der Waals radius of 235 pm. In its elemental form, cerium has a silvery white appearance. Cerium is the most abundant of the rare earth metals. It is characterized chemically by having two valence states, the +3 cerous and +4 ceric states. The ceric state is the only non-trivalent rare earth ion stable in aqueous solutions. Elemental CeriumIt is therefore strongly acidic and oxidizing, in addition to being moderately toxic.The cerous state closely resembles the other trivalent rare earths. Cerium is found in the minerals allanite, bastnasite, hydroxylbastnasite, monazite, rhabdophane, synchysite and zircon. Cerium was discovered by Martin Heinrich Klaproth, Jöns Jakob Berzelius, and Wilhelm Hisinger in 1803 and first isolated by Carl Gustaf Mosander in 1839. The element was named after the asteroid Ceres, which itself was named after the Roman god of agriculture.


Phosphorus Bohr ModelSee more Phosphorus products. Phosphorus (atomic symbol: P, atomic number: 15) is a Block P, Group 15, Period 3 element. The number of electrons in each of Phosphorus's shells is 2, 8, 5 and its electronic configuration is [Ne] 3s2 3p3. The phosphorus atom has a radius of and its Van der Waals radius is Phosphorus is a highly-reactive non-metallic element (sometimes considered a metalloid) with two primary allotropes, white phosphorus and red phosphorus its black flaky appearance is similar to graphitic carbon. Compound forms of phosphorus include phosphates and phosphides. Phosphorous was first recognized as an element by Hennig Brand in 1669 its name (phosphorus mirabilis, or "bearer of light") was inspired from the brilliant glow emitted by its distillation.


February 27, 2024
Los Angeles, CA
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