IZO Targets

CAS #:

Linear Formula:

In2O3 / ZnO

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Indium Zinc Oxide Sputtering Target
IN-ZNO-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Indium Zinc Oxide Sputtering Target
IN-ZNO-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Indium Zinc Oxide Sputtering Target
IN-ZNO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Indium Zinc Oxide Sputtering Target
IN-ZNO-05-ST
Pricing > SDS > Data Sheet >

Indium Zinc Oxide Sputtering Target Properties (Theoretical)

Compound Formula InZnO
Molecular Weight Varies by composition
Appearance Target
Melting Point 1900-1920 °C
Boiling Point N/A
Density N/A
Solubility in H2O N/A

Indium Zinc Oxide Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H411
Hazard Codes N
Precautionary Statements P273-P391-P501
Risk Codes N/A
Safety Statements N/A
Transport Information UN 3077 9/PG III
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 10/27/2020
Date Revised: 05/15/2015

SECTION 1. IDENTIFICATION

Product Name: Indium Zinc Oxide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. IN-ZNO-02-ST , IN-ZNO-03-ST , IN-ZNO-04-ST , IN-ZNO-05-ST

CAS #: 117944-65-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
GHS Classification in accordance with 29 CFR 1910 (OSHA HCS)
Short-term (acute) aquatic hazard (Category 2), H401
Long-term (chronic) aquatic hazard (Category 2), H411
GHS Label elements, including precautionary statements
Pictogram

Environment - GHS09

Signal word
Warning
Hazard statement(s)
H411 Toxic to aquatic life with long lasting effects.
Precautionary statement(s)
P273 Avoid release to the environment.
P391 Collect spillage.
P501 Dispose of contents/ container to an approved waste disposal plant.
Hazards not otherwise classified (HNOC) or not covered by GHS - none


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Diindium trioxide
CAS-No. - 1312-43-2
EC-No. - 215-193-9
Zinc oxide
CAS-No. - 1314-13-2
EC-No. - 215-222-5
Index-No. - 030-013-00-7


SECTION 4. FIRST AID MEASURES

Description of first aid measures
General advice
Consult a physician. Show this safety data sheet to the doctor in attendance.
If inhaled
If breathed in, move person into fresh air. If not breathing, give artificial respiration.
Consult a physician.
In case of skin contact
Wash off with soap and plenty of water. Consult a physician.
In case of eye contact
Flush eyes with water as a precaution.
If swallowed
Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult
a physician.
Most important symptoms and effects, both acute and delayed
The most important known symptoms and effects are described in the labelling (see section
2.2) and/or in section 11
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing media
Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide.
Special hazards arising from the substance or mixture
Zinc/zinc oxides, Indium/indium oxides
Advice for firefighters
Wear self-contained breathing apparatus for firefighting if necessary.
Further information
No data available


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Avoid dust formation. Avoid breathing vapours, mist
or gas. Ensure adequate ventilation. Avoid breathing dust.
For personal protection see section 8.
Environmental precautions
Prevent further leakage or spillage if safe to do so. Do not let product enter drains.
Discharge into the environment must be avoided.
Methods and materials for containment and cleaning up
Pick up and arrange disposal without creating dust. Sweep up and shovel. Keep in
suitable, closed containers for disposal.
Reference to other sections
For disposal see section 13.


SECTION 7. HANDLING AND STORAGE

Precautions for safe handling
Further processing of solid materials may result in the formation of combustible dusts. The
potential for combustible dust formation should be taken into consideration before
additional processing occurs.
Provide appropriate exhaust ventilation at places where dust is formed.
For precautions see section 2.2.
Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place.
Storage class (TRGS 510): 13: Non Combustible Solids
Specific end use(s)
Apart from the uses mentioned in section 1.2 no other specific uses are stipulated


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Exposure controls
Appropriate engineering controls
Handle in accordance with good industrial hygiene and safety practice. Wash hands
before breaks and at the end of workday.
Personal protective equipment
Eye/face protection
Safety glasses with side-shields conforming to EN166 Use equipment for eye
protection tested and approved under appropriate government standards such as
NIOSH (US) or EN 166(EU).
Skin protection
Handle with gloves. Gloves must be inspected prior to use. Use proper glove
removal technique (without touching glove's outer surface) to avoid skin contact
with this product. Dispose of contaminated gloves after use in accordance with
applicable laws and good laboratory practices. Wash and dry hands.
Body Protection
Choose body protection in relation to its type, to the concentration and amount of
dangerous substances, and to the specific work-place., The type of protective
equipment must be selected according to the concentration and amount of the
dangerous substance at the specific workplace.
Respiratory protection
Respiratory protection is not required. Where protection from nuisance levels of
dusts are desired, use type N95 (US) or type P1 (EN 143) dust masks. Use
respirators and components tested and approved under appropriate government
standards such as NIOSH (US) or CEN (EU).
Control of environmental exposure
Prevent further leakage or spillage if safe to do so. Do not let product enter drains.
Discharge into the environment must be avoided.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
a) Appearance Form: solid
b) Odour No data available
c) Odour Threshold No data available
d) pH No data available
e) Melting
point/freezing point
1,900 - 1,920 °C (3,452 - 3,488 °F)
f) Initial boiling point
and boiling range
No data available
g) Flash point ()No data available
h) Evaporation rate No data available
i) Flammability (solid,
gas)
No data available
j) Upper/lower
flammability or
explosive limits
No data available
k) Vapour pressure No data available
l) Vapour density No data available
m) Relative density No data available
n) Water solubility No data available
o) Partition coefficient:
n-octanol/water
No data available
p) Auto-ignition
temperature
No data available
q) Decomposition temperature
No data available
r) Viscosity No data available
s) Explosive properties No data available
t) Oxidizing properties No data available
Other safety information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Possibility of hazardous reactions
No data available
Conditions to avoid
No data available
Incompatible materials
Strong oxidizing agents
Hazardous decomposition products
Hazardous decomposition products formed under fire conditions. - Zinc/zinc oxides,
Indium/indium oxides
Other decomposition products - No data available
In the event of fire: see section 5


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity
Inhalation: No data available
No data available
Skin corrosion/irritation
No data available
Serious eye damage/eye irritation
No data available
Respiratory or skin sensitisation
No data available
Germ cell mutagenicity
No data available
Carcinogenicity
IARC: No component of this product present at levels greater than or equal to 0.1% is
identified as probable, possible or confirmed human carcinogen by IARC.
NTP: No component of this product present at levels greater than or equal to 0.1% is
identified as a known or anticipated carcinogen by NTP.
OSHA: No component of this product present at levels greater than or equal to 0.1% is
on OSHA’s list of regulated carcinogens.
Reproductive toxicity
No data available
Specific target organ toxicity - single exposure
No data available
Specific target organ toxicity - repeated exposure
No data available
Aspiration hazard
No data available
Additional Information
RTECS: Not available
Zinc oxide dust or fume can irritate the respiratory tract. Prolonged skin contact can
produce a severe dermatitis called oxide pox. Exposure to high levels of dust or fume can
cause metallic taste, marked thirst, coughing, fatigue, weakness, muscular pain, and
nausea followed by fever and chills. Severe overexposure may result in bronchitis or
pneumonia with a bluish tint to the skin., prolonged or repeated exposure can cause:,
Reversible liver enzyme abnormalities., Diarrhoea, To the best of our knowledge, the
chemical, physical, and toxicological properties have not been thoroughly investigated.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Results of PBT and vPvB assessment
PBT/vPvB assessment not available as chemical safety assessment not required/not
conducted
Other adverse effects
An environmental hazard cannot be excluded in the event of unprofessional handling or
disposal.
Toxic to aquatic life with long lasting effects.


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Product
Offer surplus and non-recyclable solutions to a licensed disposal company.
Contaminated packaging
Dispose of as unused product.


SECTION 14. TRANSPORT INFORMATION

DOT (US)
Not dangerous goods
IMDG
UN number: 3077 Class: 9 Packing group: III EMS-No: F-A, S-F
Proper shipping name: ENVIRONMENTALLY HAZARDOUS SUBSTANCE, SOLID, N.O.S. (Zinc
oxide)
Marine pollutant : yes
IATA
UN number: 3077 Class: 9 Packing group: III
Proper shipping name: Environmentally hazardous substance, solid, n.o.s. (Zinc oxide)
Further information
EHS-Mark required (ADR 2.2.9.1.10, IMDG code 2.10.3) for single packagings and
combination packagings containing inner packagings with Dangerous Goods > 5L for liquids
or > 5kg for solids.


SECTION 15. REGULATORY INFORMATION

SARA 302 Components
This material does not contain any components with a section 302 EHS TPQ.
SARA 313 Components
The following components are subject to reporting levels established by SARA Title III,
Section 313:
Zinc oxide
CAS-No.
1314-13-2
Revision Date
2007-03-01
SARA 311/312 Hazards
No SARA Hazards
Massachusetts Right To Know Components
Zinc oxide
CAS-No.
1314-13-2
Revision Date
2007-03-01
Pennsylvania Right To Know Components
Diindium trioxide CAS-No. Revision Date
1312-43-2
Zinc oxide 1314-13-2
2007-03-01
California Prop. 65 Components
This product does not contain any chemicals known to State of California to cause cancer,
birth defects, or any other reproductive harm.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2018 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Indium Zinc Oxide Sputtering Target

Indium Zinc Oxide Sputtering Target American Elements specializes in producing high purity Indium Zinc Oxide (IZO) Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. Other shapes are available by request.

Indium Zinc Oxide Sputtering Target Synonyms

IZO, InZnO, a-IZO, Amorphous Indium-Zinc-Oxide, In2Zn16O19, 694458-90, In2O3/ ZnO, 90/10 wt%

Chemical Identifiers

Linear Formula In2O3 / ZnO
MDL Number N/A
EC No. N/A
Pubchem CID 92026946

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and Switzerland JCB cards for Japan and Worldwide Boleto Bancario for Brazil iDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United Kingdom GiroPay for Germany Dankort cards for Denmark Elo cards for Brazil eNETS for Singapore CartaSi for Italy Carte-Bleue cards for France China UnionPay Hipercard cards for Brazil TROY cards for Turkey BC cards for South Korea RuPay for India

Related Elements

Indium

See more Indium products. Indium (atomic symbol: In, atomic number: 49) is a Block P, Group 13, Period 5 element with an atomic weight of 114.818. The number of electrons in each of indium's shells is [2, 8, 18, 18, 3] and its electron configuration is [Kr] 4d10 5s2 5p1. The indium atom has a radius of 162.6 pm and a Van der Waals radius of 193 pm. Indium was discovered by Ferdinand Reich and Hieronymous Theodor Richter in 1863. Indium Bohr ModelIt is a relatively rare, extremely soft metal is a lustrous silvery gray and is both malleable and easily fusible. It has similar chemical properties to Elemental Indiumgallium such as a low melting point and the ability to wet glass. Fields such as optics and microelectronics that utilize semiconductor technology have wide uses for indium, especially in the form of Indiun Tin Oxide (ITO). Thin films of Copper Indium Gallium Selenide (CIGS) are used in high-performing solar cells. Indium's name is derived from the Latin word indicum, meaning violet.

Zinc

See more Zinc products. Zinc (atomic symbol: Zn, atomic number: 30) is a Block D, Group 12, Period 4 element with an atomic weight of 65.38. The number of electrons in each of zinc's shells is 2, 8, 18, 2, and its electron configuration is [Ar] 3d10 4s2. Zinc Bohr ModelThe zinc atom has a radius of 134 pm and a Van der Waals radius of 210 pm. Zinc was discovered by Indian metallurgists prior to 1000 BC and first recognized as a unique element by Rasaratna Samuccaya in 800. Zinc was first isolated by Andreas Marggraf in 1746. In its elemental form, zinc has a silver-gray appearance. It is brittle at ordinary temperatures but malleable at 100 °C to 150 °C.Elemental Zinc It is a fair conductor of electricity, and burns in air at high red producing white clouds of the oxide. Zinc is mined from sulfidic ore deposits. It is the 24th most abundant element in the earth's crust and the fourth most common metal in use (after iron, aluminum, and copper). The name zinc originates from the German word "zin," meaning tin.

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