Yttrium Fluoride Sputtering Target

CAS #:

Linear Formula:

YF3

MDL Number:

MFCD00049714

EC No.:

237-257-5

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(3N) 99.9% Yttrium Fluoride Sputtering Target
Y-F-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Yttrium Fluoride Sputtering Target
Y-F-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Yttrium Fluoride Sputtering Target
Y-F-05-ST
Pricing > SDS > Data Sheet >

Yttrium Fluoride Sputtering Target Properties (Theoretical)

Compound Formula F3Y
Molecular Weight 145.9
Appearance White target
Melting Point 1387 °C, 1660 K, 2529 °F
Boiling Point 2230 °C, 2503 K, 4046 °F
Density 4.01 g/cm3
Solubility in H2O N/A
Exact Mass 145.901 g/mol
Monoisotopic Mass 145.901 Da

Yttrium Fluoride Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H302 + H312 + H332-H315-H319-H335
Hazard Codes Xn
Precautionary Statements P261-P280-P305 + P351 + P338 P261-P280-P305 + P351 + P338 P261-P280-P305 + P351 + P338 P261-P280-P305 + P351 + P338
Flash Point Not applicable
Risk Codes 20/21/22-36/37/38
Safety Statements 26-37/39
RTECS Number ZG3417500
Transport Information NONH for all modes of transport
WGK Germany 3
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/09/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Yttrium Fluoride Sputtering Target

Product Number: All applicable American Elements product codes, e.g. Y-F-03-ST , Y-F-04-ST , Y-F-05-ST

CAS #: 13709-49-4

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
GHS06 Skull and crossbones
Acute Tox. 3 H331 Toxic if inhaled.
GHS07
Acute Tox. 4 H302 Harmful if swallowed.
Acute Tox. 4 H312 Harmful in contact with skin.
Skin Irrit. 2 H315 Causes skin irritation.
Eye Irrit. 2A H319 Causes serious eye irritation.
STOT SE 3 H335 May cause respiratory irritation.
Hazards not otherwise classified No data available
GHS label elements, including precautionary statements
Hazard pictograms

Skull and Crossbones - GHS06 Exclamation Mark - GHS07

GHS06
Signal word Danger
Hazard statements
H302+H312 Harmful if swallowed or in contact with skin.
H331 Toxic if inhaled.
H315 Causes skin irritation.
H319 Causes serious eye irritation.
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
WHMIS classification
D1B - Toxic material causing immediate and serious toxic effects
D2B - Toxic material causing other toxic effects
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
2

1
Health (acute effects) = 2
Flammability = 0
Physical Hazard = 1
Other hazards
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
13709-49-4 Yttrium(III) fluoride
Identification number(s):
EC number: 237-257-5


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed:
No data available
Indication of any immediate medical attention and special treatment needed:
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Hydrogen fluoride (HF)
Yttrium oxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions: Do not allow product to enter drains, sewage systems, or other water courses.
Methods and materials for containment and cleanup:
Dispose of contaminated material as waste according to section 13.
Ensure adequate ventilation.
Prevention of secondary hazards: No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Handle under dry protective gas.
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires: The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles: No special requirements.
Information about storage in one common storage facility:
Store away from water/moisture.
Store away from oxidizing agents.
Further information about storage conditions:
Store under dry inert gas.
This product is hygroscopic.
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Protect from humidity and water.
Specific end use(s) No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
13709-49-4 Yttrium(III) fluoride (100.0%)
PEL (USA) Long-term value: 1 mg/m3
as Y
REL (USA) Long-term value: 1 mg/m3
as Y
TLV (USA) Long-term value: 1 mg/m3
as Y
EL (Canada) Long-term value: 1 mg/m3
as Y
Additional information: No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Avoid contact with the eyes and skin.
Maintain an ergonomically appropriate working environment.
Breathing equipment: Use suitable respirator when high concentrations are present.
Recommended filter device for short term use:
Use a respirator with type P100 (USA) or P3 (EN 143) cartridges as a backup to engineering controls. Risk assessment should be performed to determine if airpurifying
respirators are appropriate. Only use equipment tested and approved under appropriate government standards.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
The selection of suitable gloves not only depends on the material, but also on quality. Quality will vary from manufacturer to manufacturer.
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Solid in various forms
Color: White
Odor: No data available
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 1387 °C (2529 °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flammability (solid, gas) No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density: No data available
Relative density No data available.
Vapor density N/A
Evaporation rate N/A
Solubility in / Miscibility with
Water: Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity No data available
Chemical stability Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided: Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions Reacts with strong oxidizing agents
Conditions to avoid No data available
Incompatible materials:
Water/moisture
Oxidizing agents
Hazardous decomposition products:
Hydrogen fluoride
Yttrium oxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
Harmful in contact with skin.
Harmful if swallowed.
Toxic if inhaled.
Danger through skin absorption.
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for this substance.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: Causes skin irritation.
Eye irritation or corrosion: Causes serious eye irritation.
Sensitization: No sensitizing effects known.
Germ cell mutagenicity: No effects known.
Carcinogenicity: No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: May cause respiratory irritation.
Aspiration hazard: No effects known.
Subacute to chronic toxicity: The Registry of Toxic Effects of Chemical Substances (RTECS) contains multiple dose toxicity data for this substance.
Additional toxicological information: To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity: No data available
Persistence and degradability No data available
Bioaccumulative potential No data available
Mobility in soil No data available
Additional ecological information:
Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage systems.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A
Other adverse effects No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation: Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, IMDG, IATA UN3288
UN proper shipping name
DOT Toxic solid, inorganic, n.o.s. (Yttrium(III) fluoride)
IMDG, IATA TOXIC SOLID, INORGANIC, N.O.S. (Yttrium(III) fluoride)
Transport hazard class(es)
DOT
Class 6.1 Toxic substances.
Label 6.1
Class 6.1 (T5) Toxic substances
Label 6.1
IMDG, IATA
Class 6.1 Toxic substances.
Label 6.1
Packing group
DOT, IMDG, IATA III
Environmental hazards: N/A
Special precautions for user Warning: Toxic substances
EMS Number: F-A,S-A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT): No
UN "Model Regulation": UN3288, Toxic solid, inorganic, n.o.s. (Yttrium(III) fluoride), 6.1, III


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS label elements, including precautionary statements
Hazard pictograms
GHS06
Signal word Danger
Hazard statements
H302+H312 Harmful if swallowed or in contact with skin.
H331 Toxic if inhaled.
H315 Causes skin irritation.
H319 Causes serious eye irritation.
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P280 Wear protective gloves/protective clothing/eye protection/face protection.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings) Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer Substance is not listed.
Prop 65 - Developmental toxicity Substance is not listed.
Prop 65 - Developmental toxicity, female Substance is not listed.
Prop 65 - Developmental toxicity, male Substance is not listed.
Information about limitation of use: For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006. Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the
market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use) Substance is not listed.
Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Yttrium Fluoride Sputtering Target

Fluoride IonAmerican Elements specializes in producing high purity Yttrium Fluoride Sputtering Targets with the highest possible density High Purity (99.99%) Yttrium Fluoride Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes. We also produce Yttrium Fluoride as rods, powder and plates. Other shapes are available by request.

Chemical Identifiers

Linear Formula YF3
MDL Number MFCD00049714
EC No. 237-257-5
Beilstein/Reaxys No. N/A
Pubchem CID N/A
IUPAC Name Trifluoroyttrium
SMILES F[Y](F)F
InchI Identifier InChI=1S/3FH.Y/h3*1H;/q;;;+3/p-3
InchI Key RBORBHYCVONNJH-UHFFFAOYSA-K

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Yttrium

See more Yttrium products. Yttrium (atomic symbol: Y, atomic number: 39) is a Block D, Group 3, Period 5 element with an atomic weight of 88.90585. Yttrium Bohr ModelThe number of electrons in each of yttrium's shells is [2, 8, 18, 9, 2] and its electron configuration is [Kr] 4d1 5s2. The yttrium atom has a radius of 180 pm and a Van der Waals radius of 219 pm. Yttrium was discovered by Johann Gadolin in 1794 and first isolated by Carl Gustav Mosander in 1840. In its elemental form, Yttrium has a silvery white metallic appearance. Yttrium has the highest thermodynamic affinity for oxygen of any element. Elemental YttriumYttrium is not found in nature as a free element and is almost always found combined with the lanthanides in rare earth minerals. While not part of the rare earth series, it resembles the heavy rare earths which are sometimes referred to as the "yttrics" for this reason. Another unique characteristic derives from its ability to form crystals with useful properties. The name yttrium originated from a Swedish village near Vaxholm called Yttbery where it was discovered.

Fluorine

Fluorine is a Block P, Group 17, Period 2 element. Its electron configuration is [He]2s22p5. The fluorine atom has a covalent radius of 64 pm and its Van der Waals radius is 135 pm. In its elemental form, CAS 7782-41-4, fluorine gas has a pale yellow appearance. Fluorine was discovered by André-Marie Ampère in 1810. It was first isolated by Henri Moissan in 1886.

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