Lithium Lanthanum Zirconate Sputtering Target

LLZO Conductive Ceramic Electrolyte

Linear Formula:

Li₇La₃Zr₂O₁₂

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PRODUCT	Product Code	ORDER	SAFETY DATA	TECHNICAL DATA
(2N) 99% Lithium Lanthanum Zirconate Sputtering Target	LILA-ZRO-02-ST	Pricing >	SDS >	Data Sheet >
(3N) 99.9% Lithium Lanthanum Zirconate Sputtering Target	LILA-ZRO-03-ST	Pricing >	SDS >	Data Sheet >
(4N) 99.99% Lithium Lanthanum Zirconate Sputtering Target	LILA-ZRO-04-ST	Pricing >	SDS >	Data Sheet >
(5N) 99.999% Lithium Lanthanum Zirconate Sputtering Target	LILA-ZRO-05-ST	Pricing >	SDS >	Data Sheet >

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Lithium Lanthanum Zirconate Sputtering Target Properties (Theoretical)

Compound Formula	Li₇La₃Zr₂O₁₂
Molecular Weight	839.74
Appearance	White to Light Gray Target
Melting Point	190-200 °C
Boiling Point	N/A
Density	N/A
Average Particle Size	50 nm (also available in 3-4 µm)
Solubility in H2O	N/A

Lithium Lanthanum Zirconate Sputtering Target Health & Safety Information

Signal Word	Danger
Hazard Statements	H314-H335
Hazard Codes	C
Precautionary Statements	P260-P303+P361+P353-P305+P351+P338-P301+P330+P331-P304+P340-P405-P501a
Risk Codes	N/A
Safety Statements	N/A
Transport Information	UN 3262 8/PG III
GHS Pictograms	GHS05 Corrosive GHS07 Exclamation Point

View and Print SDS

SAFETY DATA SHEET

Date Created: 5/15/2015

Date Revised: 5/15/2015

SECTION 1. IDENTIFICATION

Product Name: Lithium Lanthanum Zirconate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. LILA-ZRO-05-ST, LILA-ZRO-03-ST, LILA-ZRO-04-ST, LILA-ZRO-02-ST

Relevant identified uses of the substance: Scientific research and development

SECTION 2. HAZARDS IDENTIFICATION

2.1 Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
GHS05 corrosion
Skin Corr. 1B H314 Causes severe skin burns and eye damage.
GHS07
STOT SE 3
H335 May cause respiratory irritation.
Other hazards that do not result in classification
No data available
2.2 Label elements
Labelling according to Regulation (EC) No 1272/2008
The substance is classified and labelled according to the CLP regulation.
Hazard pictograms

GHS05 GHS07
Signal word
Danger
Hazard statements
H314 Causes severe skin burns and eye damage.
H335 May cause respiratory irritation.
Precautionary statements
P260
Do not breathe dust/fume/gas/mist/vapors/spray.
P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower.
P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P301+P330+P331 IF SWALLOWED: rinse mouth. Do NOT induce vomiting.
P405
Store locked up.
P501
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A

SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

3.1 Substances
CAS# Designation:
Lithium lanthanum zirconium oxide

SECTION 4. FIRST AID MEASURES

4.1 Description of first aid measures
General information
Instantly remove any clothing soiled by the product.
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm. Consult doctor if symptoms persist.
Seek immediate medical advice.
In case of skin contact:
Instantly wash with water and soap and rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Then consult doctor.
If swallowed:
Seek medical treatment.
4.2 Most important symptoms and effects, both acute and delayed
Causes severe skin burns.
Causes serious eye damage.
4.3 Indication of any immediate medical attention and special treatment needed
No data available

SECTION 5. FIREFIGHTING MEASURES

5.1 Extinguishing media
Suitable extinguishing agents
CO2, extinguishing powder or water jet. Fight larger fires with water jet or alcohol-resistant foam.
5.2 Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Lithium oxide
Zirconium oxide
Lanthanum oxide
5.3 Advice for firefighters
Protective equipment:
Wear self-contained breathing apparatus.
Wear full protective suit.

SECTION 6. ACCIDENTAL RELEASE MEASURES

6.1 Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
6.2 Environmental precautions:
Do not allow product to enter drains, sewage systems, or other water courses system or water bodies.
6.3 Methods and materials for containment and cleanup:
Use neutralizing agent.
Dispose of contaminated material as waste according to section 13.
Ensure adequate ventilation.
Prevention of secondary hazards:
No special measures required.
6.4 Reference to other sections
See Section 7 for information on safe handling
See section 8 for information on personal protection equipment.
See Section 13 for information on disposal.

SECTION 7. HANDLING AND STORAGE

7.1 Precautions for safe handling
Handle under dry protective gas.
Keep containers tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation/exhaustion at the workplace.
Information about protection against explosions and fires:
No data available
7.2 Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and containers:
No special requirements.
Information about storage in one common storage facility:
Store away from air.
Store away from water.
Store away from oxidising agents.
Further information about storage conditions:
Store under dry inert gas.
This product is moisture sensitive.
This product is air sensitive.
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Protect from humidity and keep away from water.
Store in a locked cabinet or with access restricted to technical experts or their assistants.
7.3 Specific end use(s)
No data available

SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
8.1 Control parameters
Components with critical values that require monitoring at the workplace:
None.
Additional information:
No data
8.2 Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures should be adhered to in handling the chemicals.
Keep away from foodstuffs, beverages and food.
Instantly remove any soiled and impregnated garments.
Wash hands during breaks and at the end of the work.
Avoid contact with the eyes and skin.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use breathing protection with high concentrations.
Protection of hands:
Inspect gloves prior to use.
The selection of the suitable gloves does not only depend on the material, but also on further marks of quality and varies from manufacturer to manufacturer.
Material of gloves
Impervious gloves
Eye protection:
Tightly sealed safety glasses.
Full face protection
Body protection:
Protective work clothing.

SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

9.1 Information on basic physical and chemical properties
Appearance:
Form: Solid in various forms:
Colour: Pale grey
Smell: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: No data available
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Inflammability (solid, gas)
No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Self-inflammability: No data available.
Danger of explosion: No data available.
Critical values for explosion:
Lower: No data available
Upper: No data available
Steam pressure: N/A
Density No data available
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H₂O): No data available
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
9.2 Other information
No data available

SECTION 10. STABILITY AND REACTIVITY

10.1 Reactivity
No data available
10.2 Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
No decomposition if used and stored according to specifications.
10.3 Possibility of hazardous reactions
Reacts with strong oxidising agents
10.4 Conditions to avoid
No data available
10.5 Incompatible materials:
Air
Water/moisture
Oxidising agents
10.6 Hazardous decomposition products:
Lithium oxide
Zirconium oxide
Lanthanum oxide

SECTION 11. TOXICOLOGICAL INFORMATION

11.1 Information on toxicological effects
Acute toxicity:
Swallowing will lead to a strong caustic effect on mouth and throat and to the danger of perforation of esophagus and stomach.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
Causes severe skin burns.
Eye irritation or corrosion:
Causes serious eye damage.
Sensitization:
No sensitizing effect known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
May cause respiratory irritation.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.

SECTION 12. ECOLOGICAL INFORMATION

12.1 Toxicity
Aquatic toxicity:
No data available
12.2 Persistence and degradability
No data available
12.3 Bioaccumulative potential
No data available
12.4 Mobility in soil
No data available
Additional ecological information:
Water hazard class 1 (Self-assessment): slightly hazardous for water.
Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage systems.
Avoid transfer into the environment.
12.5 Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
12.6 Other adverse effects
No data available

SECTION 13. DISPOSAL CONSIDERATIONS

13.1 Waste treatment methods
Recommendation
Hand over to disposers of hazardous waste.
Must be specially treated under adherence to official regulations.
Consult official regulations for proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.

SECTION 14. TRANSPORT INFORMATION

UN-Number
ADR, IMDG, IATA
UN3262
14.2 UN proper shipping name
ADR
3262 CORROSIVE SOLID, BASIC, INORGANIC, N.O.S. (Lithium lanthanum zirconium oxide )
IMDG, IATA
CORROSIVE SOLID, BASIC, INORGANIC, N.O.S. (Lithium lanthanum zirconium oxide )
14.3 Transport hazard class(es)
ADR
Class
8 (C6) Corrosive substances.
Label
8
IMDG, IATA
Class
8 Corrosive substances.
Label
8
Packing group
ADR, IMDG, IATA
III
14.5 Environmental hazards:
N/A
14.6 Special precautions for user
Warning: Corrosive substances.
Kemler Number: 80
EMS Number: F-A,S-B
Segregation groups
Alkalis
14.7 Transport in bulk according to Annex II of MARPOL73/78 and the IBC
Code
N/A
Transport/Additional information:
ADR
Excepted quantities (EQ):
E1
Limited quantities (LQ)
5 kg
Transport category
3
Tunnel restriction code
E
UN "Model Regulation":
UN3262, CORROSIVE SOLID, BASIC, INORGANIC, N.O.S. (Lithium lanthanum zirconium oxide ), 8, III

SECTION 15. REGULATORY INFORMATION

15.1 Safety, health and environmental regulations/legislation specific for the substance or mixture
Australian Inventory of Chemical Substances
Substance is not listed.
Standard for the Uniform Scheduling of Drugs and Poisons
Substance is not listed.
National regulations
Information about limitation of use:
For use only by technically qualified individuals.
Employment restrictions concerning young persons must be observed.
Water hazard class:
Water hazard class 1 (Self-assessment): slightly hazardous for water.
Other regulations, limitations and prohibitive regulations
ELINCS (European List of Notified Chemical Substances)
Substance is not listed.
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
15.2 Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.

16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2016 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Lithium Lanthanum Zirconate Sputtering Target

American Elements specializes in producing high purity Lithium Lanthanum Zirconate Sputtering Targets with the highest possible density

High Purity (99.99%) Lithium Lanthanum Zirconate Sputtering Target

and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Lithium Lanthanum Zirconate Sputtering Target Synonyms

LLZO, lithium lanthanum zirconium oxide, lithium-doped lanthanum zirconate, LLZ, Li7La3Zr2O12 garnet, Li(7)La(3)Zr(2)O(12)

Chemical Identifiers

Linear Formula	Li₇La₃Zr₂O₁₂
MDL Number	N/A
EC No.	N/A

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Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

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