Cerium Zirconium Oxide Sputtering Target

Ceria Stabilized Zirconia, CSZ

CAS #:

Linear Formula:

(CeO2)-(ZrO2)

MDL Number:

MFCD00168089

EC No.:

258-407-6

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Cerium Zirconium Oxide Sputtering Target
CE-ZRO-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Cerium Zirconium Oxide Sputtering Target
CE-ZRO-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Cerium Zirconium Oxide Sputtering Target
CE-ZRO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Cerium Zirconium Oxide Sputtering Target
CE-ZRO-05-ST
Pricing > SDS > Data Sheet >

Cerium Zirconium Oxide Sputtering Target Properties (Theoretical)

Compound Formula CeZrO4
Molecular Weight 295.32
Appearance White to yellow solid
Melting Point N/A
Boiling Point N/A
Density 6.61
Solubility in H2O N/A
Exact Mass 293.789802
Monoisotopic Mass 293.789802

Cerium Zirconium Oxide Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information NONH for all modes of transport

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/10/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Cerium Zirconium Oxide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. CE-ZRO-02-ST , CE-ZRO-03-ST , CE-ZRO-04-ST , CE-ZRO-05-ST

CAS #: 53169-24-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
The substance is not classified according to the Globally Harmonized System (GHS).
Hazards not otherwise classified
No information known.
Label elements
GHS label elements
Not applicable
Hazard pictograms
Not applicable
Signal word
Not applicable
Hazard statements
Not applicable
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 1
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT:
Not applicable.
vPvB:
Not applicable.


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Chemical characterization: Substances
CAS# Description:
53169-24-7 Cerium zirconium oxide
Additional information:
Zirconium is routinely found with a low level of hafnium since separation of the two elements is difficult.


SECTION 4. FIRST AID MEASURES

Description of first aid measures
After inhalation
Supply fresh air. If required, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
After skin contact
Immediately wash with water and soap and rinse thoroughly.
Seek immediate medical advice.
After eye contact
Rinse opened eye for several minutes under running water. Then consult a doctor.
After swallowing
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No further relevant information available.
Indication of any immediate medical attention and special treatment needed
No further relevant information available.


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Wear protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without proper governmental permits.
Methods and material for containment and cleaning up:
Pick up mechanically.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Storage
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
No information known.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well sealed containers.
Specific end use(s)
No further relevant information available.


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures for handling chemicals should be followed.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Check protective gloves prior to each use for their proper condition.
The selection of suitable gloves not only depends on the material, but also on quality. Quality will vary from manufacturer to manufacturer.
Eye protection:
Safety glasses
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
General Information
Appearance:
Form: Powder
Color: Light yellow
Odor: Odorless
Odor threshold: Not determined.
pH-value: Not applicable.
Change in condition
Melting point/Melting range: Not determined
Boiling point/Boiling range: Not determined
Sublimation temperature / start: Not determined
Flash point: Not applicable
Flammability (solid, gaseous)
Product is not flammable.
Ignition temperature: Not determined
Decomposition temperature: Not determined
Auto igniting: Not determined.
Danger of explosion: Product does not present an explosion hazard.
Explosion limits:
Lower: Not determined
Upper: Not determined
Vapor pressure: Not applicable.
Density: Not determined
Relative density
Not determined.
Vapor density
Not applicable.
Evaporation rate
Not applicable.
Solubility in / Miscibility with Water: Insoluble
Partition coefficient (n-octanol/water): Not determined.
Viscosity:
dynamic: Not applicable.
kinematic: Not applicable.
Other information
No further relevant information available.


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No information known.
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No further relevant information available.
Incompatible materials:
Bases
No information known.
Hazardous decomposition products:
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
No effects known.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
May cause irritation
Eye irritation or corrosion:
May cause irritation
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
Cerium salts increase the blood coagulation rate. Exposure to cerium salts may increase sensitivity to heat, itching and skin lesions. Large doses to experimental animals have caused writhing, ataxia, labored respiration, sedation, hypotension and death by cardiovascular collapse.
Inhalation of zirconium and zirconium compounds may cause pulmonary granulomas.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No further relevant information available.
Persistence and degradability
No further relevant information available.
Bioaccumulative potential
No further relevant information available.
Mobility in soil
No further relevant information available.
Additional ecological information:
General notes:
Do not allow material to be released to the environment without proper governmental permits.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
Not applicable.
vPvB:
Not applicable.
Other adverse effects
No further relevant information available.


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult state, local or national regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

Not a hazardous material for transportation.
UN-Number
DOT, IMDG, IATA
None
UN proper shipping name
DOT, IMDG, IATA
None
Transport hazard class(es)
DOT, ADR, IMDG, IATA
Class
None
Packing group
DOT, IMDG, IATA
None
Environmental hazards:
Not applicable.
Special precautions for user
Not applicable.
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
Not applicable.
Transport/Additional information:
Not dangerous according to the above specifications.
DOT
Marine Pollutant (DOT):
No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS label elements
Not applicable
Hazard pictograms
Not applicable
Signal word
Not applicable
Hazard statements
Not applicable
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Non-Domestic Substances List (NDSL).
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Cerium Zirconium Oxide Sputtering Target

American Elements specializes in producing high purity Cerium Zirconium Oxide Sputtering Targets with the highest possible density High Purity (99.99%) Cerium Zirconium Oxide Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Cerium Zirconium Oxide Sputtering Target Synonyms

Ceria-Stabilized Zirconia, CSZ, Ceria-zirconia, Dioxocerium - dioxozirconium (1:1); Cerium(4+) tetraoxidozirconium; cerium zirconate; Cerium(IV)-zirconium(IV) oxide, Zirconia doped ceria, ceria doped zirconium oxide, zirconium oxide doped with cerium oxide, ZrO2-CeO, ceria-stabilized tetragonal zirconia polycrystals, Ce-TZP

Chemical Identifiers

Linear Formula (CeO2)-(ZrO2)
MDL Number MFCD00168089
EC No. 258-407-6
Beilstein/Reaxys No. N/A
Pubchem CID 16217313
IUPAC Name dioxocerium; dioxozirconium
SMILES O=[Ce]=O.O=[Zr]=O
InchI Identifier InChI=1S/Ce.4O.Zr
InchI Key WKROXIWGJAIPLZ-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Cerium

See more Cerium products. Cerium (atomic symbol: Ce, atomic number: 58) is a Block F, Group 3, Period 6 element with an atomic weight of 140.116. The number of electrons in each of cerium's shells is 2, 8, 18, 19, 9, 2 and its electron configuration is [Xe]4f2 6s2. Cerium Bohr ModelThe cerium atom has a radius of 182.5 pm and a Van der Waals radius of 235 pm. In its elemental form, cerium has a silvery white appearance. Cerium is the most abundant of the rare earth metals. It is characterized chemically by having two valence states, the +3 cerous and +4 ceric states. The ceric state is the only non-trivalent rare earth ion stable in aqueous solutions. Elemental CeriumIt is therefore strongly acidic and oxidizing, in addition to being moderately toxic.The cerous state closely resembles the other trivalent rare earths. Cerium is found in the minerals allanite, bastnasite, hydroxylbastnasite, monazite, rhabdophane, synchysite and zircon. Cerium was discovered by Martin Heinrich Klaproth, Jöns Jakob Berzelius, and Wilhelm Hisinger in 1803 and first isolated by Carl Gustaf Mosander in 1839. The element was named after the asteroid Ceres, which itself was named after the Roman god of agriculture.

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

Recent Research

TODAY'S TOP DISCOVERY!

December 10, 2024
Los Angeles, CA
Each business day American Elements' scientists & engineers post their choice for the most exciting materials science news of the day
Physics student builds improvised polarimeter using simple circuitry, polarizing film, and LEGO toy bricks

Physics student builds improvised polarimeter using simple circuitry, polarizing film, and LEGO toy bricks