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Zirconium Oxide Sputtering Target

CAS #: 1314-23-4
Linear Formula:
ZrO2
MDL Number
MFCD00011310
EC No.:
215-227-2

ORDER

Product Product Code ORDER SAFETY DATA Technical data
(3N) 99.9% Zirconium Oxide Sputtering Target ZR-OX-03-ST SDS > Data Sheet >
(4N) 99.99% Zirconium Oxide Sputtering Target ZR-OX-04-ST SDS > Data Sheet >
(5N) 99.999% Zirconium Oxide Sputtering Target ZR-OX-05-ST SDS > Data Sheet >
WHOLESALE/SKU 0000-742-{{nid}}

Zirconium Oxide Sputtering Target Properties (Theoretical)

Compound Formula ZrO2
Molecular Weight 123.22
Appearance White Target
Melting Point 2,715° C (4,919° F)
Boiling Point 4,300° C (7,772° F)
Density 5680 kg/m3
Solubility in H2O N/A
Exact Mass 121.895 g/mol
Monoisotopic Mass 121.894531 Da

Zirconium Oxide Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H315-H319-H335
Hazard Codes N/A
Precautionary Statements N/A
Flash Point not
Risk Codes N/A
Safety Statements N/A
RTECS Number ZH8800000
Transport Information NONH
WGK Germany nwg

About Zirconium Oxide Sputtering Target

Oxide IonAmerican Elements specializes in producing high purity Zirconium Oxide Sputtering Targets with the highest possible density High Purity (99.99%) Metallic Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. We also produce Zirconium Oxide as rods, powder and plates. Oxide compounds are not conductive to electricity. However, certain perovskite structured oxides are electronically conductive finding application in the cathode of solid oxide fuel cells and oxygen generation systems. American Elements produces to many standard grades when applicable, including Mil Spec (military grade); ACS, Reagent and Technical Grade; Food, Agricultural and Pharmaceutical Grade; Optical Grade, USP and EP/BP (European Pharmacopoeia/British Pharmacopoeia) and follows applicable ASTM testing standards. Typical and custom packaging is available. Other shapes are available by request.

Chemical Identifiers

Linear Formula ZrO2
Pubchem CID 62395
MDL Number MFCD00011310
EC No. 215-227-2
IUPAC Name Dioxozirconium
Beilstein/Reaxys No. N/A
SMILES O=[Zr]=O
InchI Identifier InChI=1S/2O.Zr
InchI Key MCMNRKCIXSYSNV-UHFFFAOYSA-N
Chemical Formula
Molecular Weight
Standard InchI
Appearance
Melting Point
Boiling Point
Density

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Related Elements

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.